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Design and Fabrication of a Quad-Mass High-Frequency Triaxial MEMS Gyroscope
更新时间：2025-05-30

    • Design and Fabrication of a Quad-Mass High-Frequency Triaxial MEMS Gyroscope

    • “Report: The latest research breakthrough has led to the emergence of a four mass high-frequency three-axis MEMS gyroscope with a size of only 3mm × 2.56mm and a resonant frequency of up to 30kHz, providing a new solution for the development of high-frequency three-axis MEMS gyroscopes.”
    • Optics and Precision Engineering   Pages: 1-12(2025)
    • CLC： TH703;TP212

    • Received：04 March 2025，

      Revised：25 March 2025，

      Published Online：30 May 2025，

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  • WEI Wenqiang,TIAN Huimin,CAI Qi,et al.Design and Fabrication of a Quad-Mass High-Frequency Triaxial MEMS Gyroscope[J].Optics and Precision Engineering, DOI：10.37188/OPE.XXXXXXXX.0001 CSTR：32169.14.OPE

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