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Design of a quasi-parallel beam electron gun with micro beam spot for Reflection High Energy Electron Diffraction
更新时间：2025-05-30

    • Design of a quasi-parallel beam electron gun with micro beam spot for Reflection High Energy Electron Diffraction

    • “In the field of microelectronics manufacturing and surface analysis, experts have developed a micro beam spot RHEED parallel beam electron gun, analyzed the characteristics of the electron optical system, simulated and designed low aberration focusing lenses, built an experimental platform for performance testing, and obtained clear diffraction spots.”
    • Optics and Precision Engineering   Pages: 1-13(2025)
    • CLC： TN16

    • Received：10 March 2025，

      Revised：15 May 2025，

      Published Online：30 May 2025，

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  • ZHAO Weixia,SHI Lina,LIU Junbiao,et al.Design of a quasi-parallel beam electron gun with micro beam spot for Reflection High Energy Electron Diffraction[J].Optics and Precision Engineering, DOI：10.37188/OPE.XXXXXXXX.0001 CSTR：32169.14.OPE

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