Research on force sensors in a micro-friction test rig

LI Hai-wen; JIA Hong-guang; WU Yi-hui; LI Feng

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Research on force sensors in a micro-friction test rig

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- Research on force sensors in a micro-friction test rig
- Optics and Precision Engineering Vol. 10, Issue 4, Pages: 388-391(2002)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所,吉林长春,中国,130033
- 作者简介：
- 基金信息：
- DOI：
  CLC： TP212
- Received：17 September 2001，
  
  Revised：20 April 2002，
  
  Published Online：15 August 2002，
  
  Published：15 August 2002
- 稿件说明：
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黎海文, 贾宏光, 吴一辉, 李锋. 微摩擦测试仪力传感器的研究[J]. 光学精密工程, 2002,(4): 388-391

LI Hai-wen, JIA Hong-guang, WU Yi-hui, LI Feng. Research on force sensors in a micro-friction test rig[J]. Editorial Office of Optics and Precision Engineering, 2002,(4): 388-391
黎海文, 贾宏光, 吴一辉, 李锋. 微摩擦测试仪力传感器的研究[J]. 光学精密工程, 2002,(4): 388-391 DOI：

LI Hai-wen, JIA Hong-guang, WU Yi-hui, LI Feng. Research on force sensors in a micro-friction test rig[J]. Editorial Office of Optics and Precision Engineering, 2002,(4): 388-391 DOI：

摘要

讨论了微尺度构件的摩擦力测试问题.Bhushan和Koinkar分别对硅材料的宏观摩擦系数和纳米摩擦系数进行了对比实验

实验表明纳米摩擦系数远远低于宏观摩擦系数.而在微机械构件中

零件的大小一般为微米级

甚至更大

接触面积也较大.载荷介于宏观和微观之间

有时会大于nN范围

因此其摩擦特殊

有可能不完全等同于宏观摩擦和纳米摩擦

因此需进一步研究.但现有的微摩擦测试仪器不管是载荷还是测量范围都是基于纳米量级

因此需要一种用于研究微机械样品间摩擦的专用仪器.本文主要对这种微摩擦测试仪中关键技术之一力传感器进行了研究.由于普通传感器在测量精度较高时

分辨率、灵敏度等均较低

不能满足系统的要求.针对普通传感器的不足

本文采用微机械工艺加工微力传感器可以大批量制量制造

且具有低成本、高精度、低驱动、高可靠性、低功耗、占用空间小、重量轻和响应速度快等优点.最后对力传感器的性能进行了分析.

Abstract

In this paper

the problem of friction testing in micro-components is discussed.The experimentation made by Bhushan and Koinkar shows that the coefficients of macro friction and nano friction are different.But in MEMS

the size of the part is several microns

or even greater than that

and the interface area is beyond nano with the load between N and nN. So the MEMS's friction is neither macro friction nor nano one

which should be studied further.But there is no any appropriate instrument to do so because the present instruments are designed for macro or nano friction testing. This paper discusses the force sensor which is used in the instrument for testing the MEMS's friction.The general force sensor's resolving power and sensitivity are too low. And we make the force sensor by MEMS technics

which has many advantages such as low cost

high precision and reliability

low drive and power consume

etc. Finally

the performance of the force sensor is present.

关键词

Keywords

references

温诗铸. 纳米摩擦学.[M].北京:清华大学出版社,1998.

成大先,机械设计手册[M].北京:化学工业出版社,1999.

刘鸿文.材料力学[M].北京:高等教育出版社,1991.

Maarten P. A hinged-pad test structure for sliding friction measurement in micro-machine[J]. SPIE,1998,3512:241-250.

Bharat B. Tribology on the macro-to nanoscales of MEMS materials:a review DSC[J].Micro-Electro-Mechanical Systems(MEMS),1998,66:265～266.

曾毅,侯国章.一种新型光纤传感器在精密产品加工中的应用研究[J].光学精密工程,2001,9(2):139-141.

迟冬祥,颜国正,丁国清.基于惯性-摩擦原理的PZT驱动器自由度驱动器的研究[J].光学精密工程,2001,9(2):135-138.

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