MEMS resonators and filters in RF systems

LI Ying-liang; PAN Wu

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MEMS resonators and filters in RF systems

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- MEMS resonators and filters in RF systems
- Optics and Precision Engineering Vol. 12, Issue 1, Pages: 47-54(2004)
- 作者机构：
  
  重庆邮电学院, 微光机电系统研究所重庆,400065
- 作者简介：
- 基金信息：
- DOI：
  CLC： TN713
- Received：20 June 2003，
  
  Revised：12 November 2003，
  
  Published Online：15 February 2004，
  
  Published：15 February 2004
- 稿件说明：
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李应良, 潘武. 射频系统中MEMS谐振器和滤波器[J]. 光学精密工程, 2004,(1): 47-54

LI Ying-liang, PAN Wu. MEMS resonators and filters in RF systems[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 47-54
李应良, 潘武. 射频系统中MEMS谐振器和滤波器[J]. 光学精密工程, 2004,(1): 47-54 DOI：

LI Ying-liang, PAN Wu. MEMS resonators and filters in RF systems[J]. Editorial Office of Optics and Precision Engineering, 2004,(1): 47-54 DOI：

摘要

介绍了目前国内外射频系统中所涉及的静电梳状谐振器、自由梁谐振器、薄膜声体波谐振器、腔结构谐振器、平行谐振器结构HF带通滤波器、折叠梁MF滤波器、分布传输线可调滤波器等MEMS谐振、滤波器件.对这些器件的结构原理、制造方法以及性能指标作了分析.把这些器件的性能指标和目前射频系统中谐振器、滤波器的性能要求进行比较

分析了这些器件的应用前景.最后

对基于MEMS技术的射频谐振器、滤波器发展作出展望.

Abstract

The development of MEMS resonators and filters of RF systems including capacitive-comb transduced micro-mechanical resonator

free-free beam micro-mechanical resonator

FBAR resonator

cavity resonator

HF micro-mechanical bandpass filter

MF micro-mechanical filter

and transmission lines for tunable filter

both at home and abroad is reviewed

and the structures

performance and fabrications of these components are analyzed. The applications of these components are forecast from the performance requirements for current RF systems

and the development trend of MEMS resonators and filters is discussed as well.

关键词

Keywords

references

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