Design of micro piezoelectric ceramic rod angular rate gyro

LIU Wu-fa; GONG Zhen-bang; JIANG Zhen

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Design of micro piezoelectric ceramic rod angular rate gyro

更新时间：2020-08-12

- Design of micro piezoelectric ceramic rod angular rate gyro
- Optics and Precision Engineering Vol. 14, Issue 3, Pages: 439-442(2006)
- 作者机构：
  
  1. 郑州大学机械工程学院,河南郑州,450002
  2. 上海大学机电与自动化学院上海,200072
- 作者简介：
- 基金信息：
- DOI：
  CLC： U666.123
- Received：22 August 2005，
  
  Revised：18 April 2006，
  
  Published Online：30 June 2006，
  
  Published：30 June 2006
- 稿件说明：
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LIU Wu-fa, GONG Zhen-bang, JIANG Zhen. Design of micro piezoelectric ceramic rod angular rate gyro[J]. Optics and precision engineering, 2006, 14(3): 439-442.
DOI：

LIU Wu-fa, GONG Zhen-bang, JIANG Zhen. Design of micro piezoelectric ceramic rod angular rate gyro[J]. Optics and precision engineering, 2006, 14(3): 439-442. DOI：

摘要

研制了基于微型压电陶瓷棒结构代替双敏感梁结构及压电陶瓷片的微型角速率陀螺

并设计了相敏检波电路。首先采用易于加工成高精度的微型陶瓷棒作为敏感体

在其上印刷成六个带状电极并予以极化构成三副电极对

然后设计了封装及相敏检波电路

从而有效地减小了敏感结构的尺寸

提高了其加工精度

实现了角速率陀螺微型化。标定结果表明

该角速率陀螺线性度好

Abstract

This paper developed a micro angular rate gyro based on micro piezoelectric ceramic rod structure instead of the sensitive double-deck structure as well as piezoelectric ceramic strain foils

and designed a phase-sensitive detection circuit. By taking the miniature ceramic rod which is easily to machine high accuracy as sensitive structure

and by printing and polarizing six belt-shaped electrodes above it to constitute three pairs of electrodes

this paper designed package and the phase-sensitive detection circuit in the system so that it effectively reduced the sensitive structure size and improved its processing precision to realize the angular rate gyro microminiaturization. Calibration results indicate that this angular rate gyro has good linearity with correlation coefficient of 0.9996

and high precision with standard error of 0.0036.

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references

. 张涛,孙立宁,蔡鹤皋. 压电陶瓷基本特性研究[J]. 光学精密工程,1998,6(5):26-32. ZHANG T, SUN L N, CAI H G. Study on the fundamental characteristics of piezoelectric element[J]. Optics and Precision Engineering, 1998,6(5):26-32.(in Chinese)

. 刘建芳,杨志刚,范尊强,等. 压电直线精密驱动器研究[J]. 光学精密工程,2005,13(1):65-72. LIU J F, YANG Z Q, FAN Z Q, et al. Precise PZT linear step actuator . Optics and Precision Engineering, 2005,13(1):65-72.(in Chinese)

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. 吴三灵,郭旻. 双组合式压电角速率陀螺传感器[J]. 测控技术,1997,16(3):24-26. WU S L, GUO M. A double-deck piezoelectric angular rate gyroscope sensor[J]. Measurement & Control Technology, 1997,16(3): 24-26.(in Chinese)

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