Micro-assembly auto-focusing system based on image processing

DUAN Rui-ling; DUAN Hui-bo; LI Qing-Xiang; LI Yu-he; YANG Zai-hua

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Micro-assembly auto-focusing system based on image processing

更新时间：2020-08-12

- Micro-assembly auto-focusing system based on image processing
- Optics and Precision Engineering Vol. 14, Issue 3, Pages: 468-471(2006)
- 作者机构：
  
  清华大学精密仪器及机械学系北京,100084
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH742.9
- Received：22 April 2005，
  
  Revised：18 April 2006，
  
  Published Online：30 June 2006，
  
  Published：30 June 2006
- 稿件说明：
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DUAN Rui-ling, DUAN Hui-bo, LI Qing-Xiang, et al. Micro-assembly auto-focusing system based on image processing[J]. Optics and precision engineering, 2006, 14(3): 468-471.
DOI：

DUAN Rui-ling, DUAN Hui-bo, LI Qing-Xiang, et al. Micro-assembly auto-focusing system based on image processing[J]. Optics and precision engineering, 2006, 14(3): 468-471. DOI：

摘要

介绍了一个基于图像处理的自动调焦系统

该系统由光学显微镜、CCD、力矩电机和齿轮传动机构等组成。调焦系统中采用粗/精结合的调焦方法

即首先采用基于Krisch边缘检测算子的清晰度评价函数对被测物体进行粗调焦

并在计算机上采集了包含目标的大致轮廓和边缘的显微图像;然后针对全景图像上的某个目标区域采用基于高频分量的清晰度评价函数进行精调焦

使得显微图像显示出更多的纹理细节。实验中清晰度评价函数算法均采用Windows下的Visual C++实现。实验结果表明

该自动调焦的系统精度可达±4.8 μm

基本上满足了微装配任务的调焦精度要求。

Abstract

Based on the image processing technology

an auto-focusing system consisted of optical microscope

CCD

moment motor and drive gear etc

was presented. In combination of coarse with fine adjustment method

this system applied Krisch-image edge gradient operator to evaluate the entire microscopic image of the micro-object for its coarse focus position

the system also used the sharpness function based on high frequency component to evaluate the certain domain of the microscopic image for fine adjustment. The sharpness functions used in the experiment were programmed with Visual C++

and the experimental results show that the position accuracy of auto-focusing system is less than ±4.8 μm

which satisfies the focusing requirement of the micro-assembly.

关键词

Keywords

references

. 李庆祥,王东生,李玉和.现代精密仪器设计[M]. 北京:清华大学出版社,2004. LI Q X, WANG D S, LI Y H. The design of modern precise instruments [M].Beijing: Tsinghua University Press, 2004.(in Chinese)

. 李玉和. 基于光学显微镜的微器件装配系统关键技术的研究 . 北京:清华大学,2001. LI Y H. Research on key technologies for micro-parts assembly system based on optical microscope . Beijing: Tsinghua University, 2001.(in Chinese)

. 门涛,陈建安. 基于平滑阈值函数的小波图像去噪[J]. 计算机工程与科学,2004,26(8):50-52. MEN T, CHEN J A. Wavelet denoise image based on smoothing threshold function[J].Computer Engineering and Scientifics,2004, 26(8):50-52.(in Chinese)

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. 杨再华. 显微系统自动调焦方法研究 . 北京:清华大学,2004. YANG Z H. Research on auto-focus technology of microscopy system . Beijing: Tsinghua University, 2004.(in Chinese)

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