Comparison of different processes in making EHDmicropump electrode

YU He; ZHANG Qiang; QIAO Da-yong; YU Jian

doi:null

您当前的位置：

首页 >

文章列表页 >

Comparison of different processes in making EHDmicropump electrode

Article | 更新时间：2020-08-12

- Comparison of different processes in making EHDmicropump electrode
- Optics and Precision Engineering Vol. 17, Issue 7, Pages: 1635-1639(2009)
- 作者机构：
  
  1. 西北工业大学陕西省微纳米系统实验室,陕西西安,710072
  2. 北京工业大学传热强化与过程节能教育部重点实验室及传热与能源利用北京市重点实验室北京,100022
- 作者简介：
- 基金信息：
- DOI：
  CLC： TH38
- Received：20 January 2009，
  
  Revised：30 April 2009，
  
  Published Online：25 July 2009，
  
  Published：25 July 2009
- 稿件说明：
移动端阅览
于翮, 张强, 乔大勇, 俞坚. 电液动力微泵微电极的不同制作工艺的比较[J]. 光学精密工程, 2009,17(7): 1635-1639

YU He, ZHANG Qiang, QIAO Da-yong, YU Jian. Comparison of different processes in making EHDmicropump electrode[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1635-1639
于翮, 张强, 乔大勇, 俞坚. 电液动力微泵微电极的不同制作工艺的比较[J]. 光学精密工程, 2009,17(7): 1635-1639 DOI：

YU He, ZHANG Qiang, QIAO Da-yong, YU Jian. Comparison of different processes in making EHDmicropump electrode[J]. Editorial Office of Optics and Precision Engineering, 2009,17(7): 1635-1639 DOI：

摘要

基于MEMS加工技术的电液动力微泵在微流体冷却系统和解决高热流器件的冷却问题中占有重要地位。电液动力微泵的核心部分是通过MEMS加工工艺制作的由成对的发射极和集电极组成的微电极。在电极对间的强电场作用下

电介质流体中的离子、极子以及微粒同电场相互作用来驱动流体流动。本文系统地讨论了微电极在设计和制作中需要关注的问题:电极材料的选择方针

多种形状的电极设计和两种电极加工工艺电镀法和剥离法的对比。实验结果表明:贵金属有更好的抗电化腐蚀能力;同普通平行电极结构相比

带有尖锐结构的电极更能提高微泵的性能;相比电镀法

剥离法能更好地提高电极的制作质量。

Abstract

The fabrication and design of micro-electrodes(the key component of Electrohydrodynamic(EHD) micropump) using MEMS technology are studied in this paper. The main part of the EHD micropump is a planar electrode array composed of electrode pairs made of the emitter and the collector. The electrohydrodynamic (EHD) pump uses the interaction between an electric field and electric charges

dipoles or particles embedded in a dielectric fluid to drive the fluid. The major key-controlling variables including the selection of electrode materials

diversification of electrode geometrical design

comparison of different fabrication processes

electroplating and kit-off process are analyzed systematically.The experimental results show that noble metals have good performance of resistance for corrosion electrochemical processes

and the electrode with sharp geometry can improve the performance of micropump. It also shows that kit-off process is better than electroplating process in electrode quality.

关键词

Keywords

references

GARIMELLA S V. Advances in mesoscale thermal management technologies for microelectronics [J]. Microelectronics,2006,37:1165-1185.[2] DARABI J, RADA M. Design, fabrication, and testing of an electrohydrodynamic ion-drag micropump [J].Journal of Microelectromechanical Systems, 2002,11(6):684-690.[3] 吴丽萍,杨志刚,程光明,等. 声控无阀电喷泵流[J]. 光学精密工程,2008,16(4):651-655. WU L P, YANG ZH G, CHENG G M, et al.. Non-valve piezoelectric fountain pump by sound control circuit, [J]. Opt. Precision Eng., 2008,16(4):651-655. (in Chinese)[4] 张涛,吴一辉,黎海文,等. 基于MEMS工艺的高能量密度微电磁驱动器[J]. 光学精密工程,2007,15(6):866-890. ZHANG T, WU Y H, LI H W, et al.. Micro electromagnetic actuator with high energy density based on MEMS technology[J]. Opt. Precision Eng., 2007,15(6):866-890. (in Chinese)[5] 张鹏,左春柽,周德义,等. 矩形微流道内流体电动效应研究[J]. 光学精密工程,2007,15(14):522-526. ZHANG P, ZUO CH CH, ZHOU D Y, et al.. Study on characteristics of liquid flow through a rectangular microchannel with electrokinetic effects, [J]. Opt. Precision Eng., 2007,15(4):522-526. (in Chinese)[6] RICHTER A, PLETTNER A. An electrohydrodynamic micropump[J].Sensors and Actuators A, 1991,29:159-168.[7] AHN S H.Fabrication and experiment of a planar micro ion drag pump [J].Sensors and Actuators A,1998,70:1-5.[8] BENETIS V. Experimental and computational investigation of planar ion drag micropump geometrical design parameters .Maryland University, 2005.[9] PICKARD W F. Ion drag pumping: II. experiment[J]. Appl. Phys., 1963, 34 (2): 251-258.[10] 杜立群,刘海军,秦江,等. 微电镀器件铸层均匀性研究[J]. 光学精密工程,2007,15(1):69-72. DU L Q, LIU H J, QIN J, et al.. Study on uniformity of micro-electroformed deuce [J]. Opt. Precision Eng.,2007,15(1):69-72. (in Chinese)[11] 李加东,吴一辉,张平,等. 掩膜电镀镍微结构的镀层均匀性研究[J]. 光学精密工程,2008,16(3):452-455. LI J D, WU Y H, ZHANG P, et al.. Thickness uniformity of Ni microstructure deposited by through-mask electroplating, [J]. Opt. Precision Eng., 2008,16(3):452-455. (in Chinese)[12] 董立军,陈大鹏,欧毅,等. MEMS中的簿膜制造技术[J]. 电子工业专用设备,2006,32(1):39-42. DONG L J, CHEN D P,OU Y,et al.. Thin film making technology in MEMS[J].Equipment for Electronic Product Manufacturing,2006,32(1):39-42. (in Chinese)[13] VETTER K J. Electrochemical Kinetics [M].Academic Press,1967.[14] CAMPBELI S A. The Science and Engineering of Microelectronic Fabrication[M]. 2nd ed.Oxford Univ.Press,2003:284-290.

Views

596

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Development of ion-drag EHD micropump

Fabrication of substrate and film in MEMS using CMP

Shock reliability enhancement by flexible stop for MEMS inertial switch

Stability of nano-scale thin metal films under tension

Theory Analysis and the Experiment of Crosstalk on Grating Light Modulator Array

Related Author

YU He

ZHANG Qiang

QIAO Da-yong

YU Jian

Yi-bo ZENG

Jie ZHANG

Ma-hui XU

Rui HAO

Related Institution

Key Laboratory of Enhanced Heat Transfer and Energy Conservation, Ministry of Education, Beijing University of Technology

School of Aerospace Engineering, Xiamen University

School of Physical Science and Technology, Xiamen University

Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University, Xiamen

School of Mechanical Engineering, Nanjing University of Science and Technology

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰