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1.南京邮电大学 通信与信息工程学院,江苏 南京 210003
2.中国科学院 苏州纳米技术与纳米仿生研究所,江苏 苏州 215123
E-mail: liuqf@njupt.edu.cn;liuqf@njupt.edu.cn
Received:24 June 2022,
Revised:22 August 2022,
Published Online:30 September 2022,
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沈威,徐许,高宏伟等.氮化镓基异质结构光子晶体微腔特性[J].光学精密工程,
SHEN Wei,XU Xu,GAO Hongwei,et al.Study on the characteristics of gallium nitride based hetero-structure photonic crystal micro-cavity[J].Optics and Precision Engineering,
沈威,徐许,高宏伟等.氮化镓基异质结构光子晶体微腔特性[J].光学精密工程, DOI:10.37188/OPE.XXXXXXXX.0001
SHEN Wei,XU Xu,GAO Hongwei,et al.Study on the characteristics of gallium nitride based hetero-structure photonic crystal micro-cavity[J].Optics and Precision Engineering, DOI:10.37188/OPE.XXXXXXXX.0001
本论文提出了氮化镓基有源体系的异质结构光子晶体谐振腔,以实现高品质因子和小模场体积的有源集成蓝光谐振。通过能带分析,明确了异质结构光子晶体谐振腔的工作机理。基于光子晶体的能带带边和带隙原理,实现了光子面内反馈、高品质因子谐振和面外垂直发射。基于时域有限差分方法,研究了核心区和包层区不同谐振腔参数下的谐振特性。讨论了微腔结构与谐振品质因子、腔损耗、谐振频率、模场体积等的影响关系。研究表明,通过异质结构可以有效的降低面内谐振损耗,实现了有源集成型蓝光波段的Purcell因子达到769,模场体积为0.7(
λ
/
n
)
3
。该研究为蓝光波段高
Q
/
V
m
谐振腔的设计开辟了道路,同时为具备优异谐振特性的异质结构光子晶体微腔的研究奠定了方法和理论基础。
In order to obtain a resonant micro-cavity in blue band with high quality factor and small mode volume, this research proposed a two-dimensional photonic crystal resonant structure with hetero-structure on GaN based active platform. Through band structure analysis, the working mechanism of the hetero-structure photonic crystal resonator was clarified. Based on the band edge and band gap principle of photonic crystals, the photonic in-plane feedback, high quality factor resonance and out-of-plane vertical emission were realized. The resonance characteristics of the core region and the cladding region under different cavity parameters were studied based on the finite difference time domain (FDTD) simulation. The relationship between the micro-cavity structure and the resonance quality factor, cavity loss, resonance frequency, and mode volume were discussed. This research paves the way for the design of high-Q/V
m
resonator in the blue band, and lays a method and theoretical basis for the study of hetero-structure photonic crystal micro-cavities with excellent resonance characteristics.
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