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Development of bi-directional high overload silicon-based differential pressure sensitive element
更新时间：2025-01-08
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    • Development of bi-directional high overload silicon-based differential pressure sensitive element

    • “In the field of differential pressure sensors, researchers have designed a beam island displacement membrane structure differential pressure sensing element, which effectively improves the bidirectional overload capacity.”
    • Optics and Precision Engineering   Pages: 1-11(2025)
    • CLC： TP212

    • Received：25 October 2024，

      Revised：26 December 2024，

      Published Online：08 January 2025，

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  • DU Liqun,LI Aoqi,LI Meng,et al.Development of bi-directional high overload silicon-based differential pressure sensitive element[J].Optics and Precision Engineering, DOI：10.37188/OPE.XXXXXXXX.0001

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