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Development of bi-directional high overload silicon-based differential pressure sensitive element
更新时间：2025-01-08

    • Development of bi-directional high overload silicon-based differential pressure sensitive element

    • “In the field of differential pressure sensors, researchers have designed a beam island displacement membrane structure differential pressure sensing element, which effectively improves the bidirectional overload capacity.”
    • Optics and Precision Engineering   Pages: 1-11(2025)
    • CLC： TP212

    • Received：25 October 2024，

      Revised：26 December 2024，

      Published Online：08 January 2025，

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  • DU Liqun,LI Aoqi,LI Meng,et al.Development of bi-directional high overload silicon-based differential pressure sensitive element[J].Optics and Precision Engineering, DOI：10.37188/OPE.XXXXXXXX.0001

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Related Author

DU Liqun
LI Aoqi
Feilu CHEN
Yuancheng ZHENG
Jianmei SUN
Wei CHEN
Chi WANG
Xun WANG

Related Institution

Department of Precision Mechanical Engineering， Shanghai University
Key Laboratory of Space-based Dynamic & Rapid Optical Imaging Technology， Chinese Academy of Sciences
University of Chinese Academy of Sciences
Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences
SKL of mechanical manufacturing system engineering, Xi'an JIAOTONG University
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