您当前的位置：
首页 >
文章列表页 >
Development of bi-directional high overload silicon-based differential pressure sensitive element
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-03-21
|

    • Development of bi-directional high overload silicon-based differential pressure sensitive element

    • “In the field of sensor technology, researchers have designed a differential pressure sensing element with a beam island displacement membrane structure, effectively improving the bidirectional overload capacity.”
    • Optics and Precision Engineering   Vol. 33, Issue 2, Pages: 209-219(2025)

    • DOI：10.37188/OPE.20253302.0209    

      CLC： TP212
    • CSTR：32169.14.OPE.20253302.0209    

    • Received：25 October 2024，

      Revised：26 December 2024，

      Published：25 January 2025

    移动端阅览

  • DU Liqun,LI Aoqi,LI Meng,et al.Development of bi-directional high overload silicon-based differential pressure sensitive element[J].Optics and Precision Engineering,2025,33(02):209-219. DOI： 10.37188/OPE.20253302.0209. CSTR： 32169.14.OPE.20253302.0209.

  •  
  •  

0

Views

0

下载量

0

CSCD

Alert me when the article has been cited
提交
Tools
Download
Export Citation
Share
Add to favorites
Add to my album

Related Articles

Development of bi-directional high overload silicon-based differential pressure sensitive element
Design of lightweight split support structure for large space off-axis three mirror camera
On force and deformation of cantilever Y adjustment mechanism of target alignment sensor
Optimization design and test for bracket of star sensor in micro-satellite
Modal truncation method to vibration analysis of the stator of ultrasonic motor

Related Author

LI Aoqi
DU Liqun
Xun WANG
Peng XIE
Wei-yang SONG
Ling-ling JING
Ya-nan ZHANG
Han-yu ZHU

Related Institution

Changchun Institute of Optics， Fine Mechanics and Physics， Chinese Academy of Sciences
University of Chinese Academy of Sciences
Key Laboratory of Space-based Dynamic & Rapid Optical Imaging Technology， Chinese Academy of Sciences
School of Mechatronics Engineering and Automation, Shanghai University
Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
0