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Adaptive focusing evaluation algorithm for optical imaging of wafer positioning marks
Modern Applied Optics | 更新时间：2025-03-26
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    • Adaptive focusing evaluation algorithm for optical imaging of wafer positioning marks

    • “In the field of wafer positioning and marking, experts have proposed an adaptive focusing evaluation algorithm based on multi-directional gradient variance, which effectively improves the sensitivity and stability of automatic focusing.”
    • Optics and Precision Engineering   Vol. 33, Issue 3, Pages: 389-401(2025)

    • DOI：10.37188/OPE.20253303.0389    

      CLC： TH744;TP391.4
    • CSTR：32169.14.OPE.20253303.0389    

    • Received：25 November 2024，

      Revised：18 December 2024，

      Published：10 February 2025

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  • YANG Jin,ZHANG Hangying,MENG Kai,et al.Adaptive focusing evaluation algorithm for optical imaging of wafer positioning marks[J].Optics and Precision Engineering,2025,33(03):389-401. DOI： 10.37188/OPE.20253303.0389. CSTR： 32169.14.OPE.20253303.0389.

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