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Design and experiment of multi-beam electron source
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-04-17

    • Design and experiment of multi-beam electron source

    • “In the field of improving the flux of single electron beam devices, researchers have developed a multi beam electron source system based on Schottky cathodes, which enables the preparation of porous array beam splitters and high-precision assembly of microarray electrostatic lenses, providing a solution for the design of multi electron beam devices.”
    • Optics and Precision Engineering   Vol. 33, Issue 5, Pages: 741-750(2025)

    • DOI：10.37188/OPE.20253305.0741    

      CLC： TN16
    • CSTR：32169.14.OPE.20253305.0741    

    • Received：20 November 2024，

      Revised：06 January 2025，

      Published：10 March 2025

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  • ZHAO Weixia,BAI Lingchao,ZHANG Lixin,et al.Design and experiment of multi-beam electron source[J].Optics and Precision Engineering,2025,33(05):741-750. DOI： 10.37188/OPE.20253305.0741. CSTR： 32169.14.OPE.20253305.0741.

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