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Femtosecond laser fused silica microhemispherical resonator release enhanced by a silicon reflective target
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-05-26

    • Femtosecond laser fused silica microhemispherical resonator release enhanced by a silicon reflective target

    • “A new breakthrough has been made in the technology of fused quartz micro hemispherical resonant gyroscope. Experts have optimized the release process through femtosecond laser processing, significantly improving the release speed and surface quality, providing technical support for the preparation of high-performance quartz micro hemispherical resonators.”
    • Optics and Precision Engineering   Vol. 33, Issue 6, Pages: 905-915(2025)

    • DOI：10.37188/OPE.20253306.0905    

      CLC： TN249
    • CSTR：32169.14.OPE.20253306.0905    

    • Received：14 January 2025，

      Revised：10 February 2025，

      Published：25 March 2025

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  • ZHUANG Xuye,QIAO Qi,GAO Zhongfeng,et al.Femtosecond laser fused silica microhemispherical resonator release enhanced by a silicon reflective target[J].Optics and Precision Engineering,2025,33(06):905-915. DOI： 10.37188/OPE.20253306.0905. CSTR： 32169.14.OPE.20253306.0905.

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