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High performance piezoelectric rotary actuator based on active inertia compensation
Micro/Nano Technology and Fine Mechanics | 更新时间:2025-07-08
    • High performance piezoelectric rotary actuator based on active inertia compensation

    • In the field of ultra precision, experts have proposed a piezoelectric rotary actuator design based on active inertia compensation, which effectively suppresses the back motion of the rotor and achieves efficient and stable stick slip motion, with great potential for application.
    • Optics and Precision Engineering   Vol. 33, Issue 10, Pages: 1571-1583(2025)
    • DOI:10.37188/OPE.20253310.1571    

      CLC: TP394.1;TH691.9
    • CSTR:32169.14.OPE.20253310.1571    
    • Received:08 February 2025

      Revised:04 March 2025

      Published:25 May 2025

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  • YU Haiyang,YAN Peng,MENG Lingchen.High performance piezoelectric rotary actuator based on active inertia compensation[J].Optics and Precision Engineering,2025,33(10):1571-1583. DOI: 10.37188/OPE.20253310.1571. CSTR: 32169.14.OPE.20253310.1571.

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Related Institution

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