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Dwell time compensation for millimeter spot-sized ion beam figuring based on frequency-domain filtered surface
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-07-23

    • Dwell time compensation for millimeter spot-sized ion beam figuring based on frequency-domain filtered surface

    • “In the field of high-precision optical component processing, experts have proposed an optimization method for ion beam processing convergence rate based on frequency domain filtering, which effectively improves the error correction ability of the fine beam diameter removal function and provides a solution for consistent convergence of errors across the entire frequency band.”
    • Optics and Precision Engineering   Vol. 33, Issue 11, Pages: 1739-1749(2025)

    • DOI：10.37188/OPE.20253311.1739    

      CLC： TN305.2
    • CSTR：32169.14.OPE.20253311.1739    

    • Received：12 March 2025，

      Revised：22 April 2025，

      Published：10 June 2025

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  • BIAN Meng,HU Haixiang,TANG Wa,et al.Dwell time compensation for millimeter spot-sized ion beam figuring based on frequency-domain filtered surface[J].Optics and Precision Engineering,2025,33(11):1739-1749. DOI： 10.37188/OPE.20253311.1739. CSTR： 32169.14.OPE.20253311.1739.

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