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Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-08-04

    • Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope

    • “According to the latest report, a research team has designed a high-frequency three-axis MEMS gyroscope with small size and strong anti-interference ability, providing a new solution for gyroscope development.”
    • Optics and Precision Engineering   Vol. 33, Issue 12, Pages: 1916-1928(2025)

    • DOI：10.37188/OPE.20253312.1916    

      CLC： TH703;TP212
    • CSTR：32169.14.OPE.20253312.1916    

    • Received：04 March 2025，

      Revised：25 March 2025，

      Published：25 June 2025

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  • WEI Wenqiang,TIAN Huimin,CAI Qi,et al.Design and fabrication of a quad-mass high-frequency triaxial MEMS gyroscope[J].Optics and Precision Engineering,2025,33(12):1916-1928. DOI： 10.37188/OPE.20253312.1916. CSTR： 32169.14.OPE.20253312.1916.

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