Development and error analysis of cross-scale micro-nano coordinate measuring machine

HUANG Qiangxian; LIU Huijie; ZHANG Zuyang; LI Hongli; CHENG Rongjun; ZHANG Liansheng; LI Ruijun

doi:10.37188/OPE.20253319.3058

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Development and error analysis of cross-scale micro-nano coordinate measuring machine

Micro/Nano Technology and Fine Mechanics | 更新时间：2025-11-03

- Development and error analysis of cross-scale micro-nano coordinate measuring machine
- Optics and Precision Engineering Vol. 33, Issue 19, Pages: 3058-3069(2025)
- 作者机构：
  
  合肥工业大学仪器科学与光电工程学院测量理论与精密仪器安徽省重点实验室，安徽合肥 230009
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20253319.3058
  CLC： TH711;TB9
- CSTR：32169.14.OPE.20253319.3058
- Received：30 June 2025，
  
  Revised：2025-07-28，
  
  Published：10 October 2025
- 稿件说明：
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黄强先,刘慧洁,张祖杨等.跨尺度微纳米三坐标测量机研制及误差分析[J].光学精密工程,2025,33(19):3058-3069.

HUANG Qiangxian,LIU Huijie,ZHANG Zuyang,et al.Development and error analysis of cross-scale micro-nano coordinate measuring machine[J].Optics and Precision Engineering,2025,33(19):3058-3069.
黄强先,刘慧洁,张祖杨等.跨尺度微纳米三坐标测量机研制及误差分析[J].光学精密工程,2025,33(19):3058-3069. DOI： 10.37188/OPE.20253319.3058. CSTR： 32169.14.OPE.20253319.3058.

HUANG Qiangxian,LIU Huijie,ZHANG Zuyang,et al.Development and error analysis of cross-scale micro-nano coordinate measuring machine[J].Optics and Precision Engineering,2025,33(19):3058-3069. DOI： 10.37188/OPE.20253319.3058. CSTR： 32169.14.OPE.20253319.3058.

摘要

为解决三维超精密测量中大行程运动与高精度测量之间的矛盾，研制了一种新型的跨尺度微纳米三坐标测量机（Cross-Scale Micro-Nano Coordinate Measuring Machine， CSMN-CMM），测量体积为100 mm×100 mm×100 mm。不同于传统坐标测量机的结构形式，CSMN-CMM采用独立的、三维方向都符合阿贝原则的计量系统布局，既消除了运动系统对计量系统的影响，又避免阿贝误差。其运动系统由三维气浮宏动台和六自由度微动台构成，宏微协同的运动模式在提高测量效率的同时完成高精度触发及测量任务。测头系统方面，采用高精度三维接触式测头或谐振式触发测头完成测量，谐振式触发测头的光纤探针测球直径可达70 μm以下。针对测量机存在的主要误差来源，基于坐标转换建立空间误差补偿模型并完成误差分离。依据ISO 10360-2，对CSMN-CMM整机测量性能进行检验，得到其最大允许误差优于±（250 nm+3.6×10

-6

）。实验结果表明，CSMN-CMM具有亚微米三维测量精度，可以实现低至100 μm内尺寸的测量，其结构设计及关键技术对高精度三维测量具有重要意义。

Abstract

To resolve the conflict between large-stroke motion and high-precision measurement， a novel cross-scale micro–nano coordinate measuring machine （CSMN-CMM） with a 100 mm × 100 mm × 100 mm measuring volume is presented. Unlike conventional coordinate measuring machines （CMMs）， the CSMN-CMM adopts an independent metrology syst

em layout that satisfies the Abbe principle in all three dimensions， thereby isolating the metrology system from motion-induced disturbances and eliminating Abbe error. The motion architecture comprises a 3D air-bearing macro-motion stage coupled with a six-degree-of-freedom micro-motion stage； this macro-micro collaborative motion scheme improves measurement efficiency while enabling high-precision triggering and probing. For probing， either a high-precision 3D contact probe or a resonant probe is employed， with the resonant probe capable of using microspheres down to 70 μm in diameter. Major error sources were addressed by developing a spatial error-compensation model based on coordinate transformation and by applying error-separation techniques. Measurement performance was assessed in accordance with ISO 10360-2， yielding a maximum permissible error （MPE） better than ±（250 nm+3.6×10

-6

）. Experimental results demonstrate sub-micron 3D measurement accuracy and the ability to measure internal features as small as 100 μm. The proposed structural design and enabling technologies represent a significant advance for high-precision 3D metrology.

关键词

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references

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