Piezoelectric linear-rotary motion stage based on stick-slip driving principle

XU Liwen; WANG Dongming; CHEN Wanjiang; LI Ruijie; XIAO Xiaohui; FENG Zhao

doi:10.37188/OPE.20253319.3078

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Piezoelectric linear-rotary motion stage based on stick-slip driving principle

Micro/Nano Technology and Fine Mechanics | 更新时间：2025-11-03

- Piezoelectric linear-rotary motion stage based on stick-slip driving principle
- Optics and Precision Engineering Vol. 33, Issue 19, Pages: 3078-3092(2025)
- 作者机构：
  
  武汉大学动力与机械学院，湖北武汉 430072
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20253319.3078
  CLC： TH112
- CSTR：32169.14.OPE.20253319.3078
- Received：17 June 2025，
  
  Revised：2025-07-10，
  
  Published：10 October 2025
- 稿件说明：
移动端阅览
徐丽雯,王栋铭,陈万江等.基于粘滑驱动原理的压电式直线-旋转运动平台[J].光学精密工程,2025,33(19):3078-3092.

XU Liwen,WANG Dongming,CHEN Wanjiang,et al.Piezoelectric linear-rotary motion stage based on stick-slip driving principle[J].Optics and Precision Engineering,2025,33(19):3078-3092.
徐丽雯,王栋铭,陈万江等.基于粘滑驱动原理的压电式直线-旋转运动平台[J].光学精密工程,2025,33(19):3078-3092. DOI： 10.37188/OPE.20253319.3078. CSTR： 32169.14.OPE.20253319.3078.

XU Liwen,WANG Dongming,CHEN Wanjiang,et al.Piezoelectric linear-rotary motion stage based on stick-slip driving principle[J].Optics and Precision Engineering,2025,33(19):3078-3092. DOI： 10.37188/OPE.20253319.3078. CSTR： 32169.14.OPE.20253319.3078.

摘要

针对机器人辅助靶向穿刺等手术中斜角柔性针对直线运动与旋转运动的需求，基于粘滑驱动原理设计了直线-旋转粘滑式压电驱动运动平台，该平台由二自由度柔顺驱动机构与主动锁定柔顺机构构成，可分别实现直线-旋转两自由度运动，并有效抑制运动回退现象的发生。运用柔度矩阵法和闭环串行柔顺机构计算模型推导静力学方程，并结合遗传算法优化结构参数。再基于有限元进行静态、模态及瞬态响应分析，获取仿真放大比、验证主动锁定柔顺机构有效性。实验结果表明，直线与旋转运动的实验放大比分别为2.865和1.568；主动锁定柔顺机构使直线、旋转运动回退位移减少69.15%和89.40%；驱动器的最大直线速度达2 428.25 µm/s，分辨率为0.569 µm；可实现360°旋转，最大速度为58 019 µrad/s，分辨率为14.4 µrad，平台兼具低耦合运动特性与高正反向运动一致性（≥94%），满足靶向穿刺等场景的任务需求。

Abstract

A linear-rotary piezoelectric motion platform based on the stick-slip driving principle was developed to address the requirements of robot-assisted target puncture. The platform integrates a two-degree-of-freedom flexure mechanism with an active locking flexure mechanism to achieve coupled linear-rotary motion while effectively suppressing backward displacement. Statics were derived using the compliance matrix method and a closed-loop serial flexure model， and structural parameters were optimized via a genetic algorithm. Static， modal， and transient response analyses were conducted using finite element analysis to determine the optimized amplification ratios and to validate the effectiveness of the active locking mechanism. Experimental results indicate amplification ratios of 2.865 and 1.568 for linear and rotary motions， respectively. The active locking mechanism reduced linear and rotary retraction displacements by 69.15% and 89.40%. The actuator attained a maximum linear velocity of 2 428.25 μm/s with a resolution of 0.569 μm. In the rotary direction， continuous 360° rotation was achieved with a maximum speed of 58 019 μrad/s and a resolution of 14.4 μrad. The actuator exhibited low coupling between motions and high bidirectional motion consistency （≥94%）， demonstrating suitability for target-puncture applications.

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