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Miniature high-precision grating displacement sensor design and error compensation
Micro/Nano Technology and Fine Mechanics | 更新时间：2026-01-15

    • Miniature high-precision grating displacement sensor design and error compensation

    • “In the field of precision displacement measurement, researchers have proposed a new type of micro grating displacement sensor, which achieves high range length ratio and high-precision measurement through the design of a "W" - shaped reflective folding optical path structure, solving the measurement problem in narrow spaces.”
    • Optics and Precision Engineering   Vol. 33, Issue 22, Pages: 3525-3535(2025)

    • DOI：10.37188/OPE.20253322.3525    

      CLC： TP212
    • CSTR：32169.14.OPE.20253322.3525    

    • Received：02 July 2025，

      Revised：2025-10-22，

      Published：25 November 2025

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  • LI Ziwen,ZHAO Maozhong,DU Wei,et al.Miniature high-precision grating displacement sensor design and error compensation[J].Optics and Precision Engineering,2025,33(22):3525-3535. DOI： 10.37188/OPE.20253322.3525. CSTR： 32169.14.OPE.20253322.3525.

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