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Advances in micro/nano CMM
Micro/Nano Technology and Fine Mechanics | 更新时间：2025-12-19

    • Advances in micro/nano CMM

    • “In the field of ultra precision devices, experts have reviewed the research progress of micro nano coordinate measuring machines and proposed an innovative method for spatial error modeling and compensation based on Abbe and Bryan principles, providing a solution for achieving nanometer level precision measurement.”
    • Optics and Precision Engineering   Vol. 33, Issue 23, Pages: 3672-3690(2025)

    • DOI：10.37188/OPE.20253323.3672    

      CLC： TH71;TH74
    • CSTR：32169.14.OPE.20253323.3672    

    • Received：10 July 2025，

      Revised：2025-07-28，

      Published：10 December 2025

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  • HE Yaxiong,LI Ruijun,HUANG Qiangxian,et al.Advances in micro/nano CMM[J].Optics and Precision Engineering,2025,33(23):3672-3690. DOI： 10.37188/OPE.20253323.3672. CSTR： 32169.14.OPE.20253323.3672.

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