Mirror surface shape measurement based on multiple probes
Modern Applied Optics|更新时间:2026-03-12
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Mirror surface shape measurement based on multiple probes
“The research progress in the field of optical component grinding and detection was introduced, and relevant experts proposed a non-contact multi probe surface shape detection method, providing a new solution to the problem of traditional detection methods being difficult to balance accuracy and efficiency.”
Optics and Precision EngineeringVol. 34, Issue 5, Pages: 701-710(2026)
QU Zihao,WANG Xiaokun,CAI Mengxue,et al.Mirror surface shape measurement based on multiple probes[J].Optics and Precision Engineering,2026,34(05):701-710.