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Low-voltage and compact MEMS micromirror based on double-mask silicon-glass bonding unequal height process
Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-03-12

    • Low-voltage and compact MEMS micromirror based on double-mask silicon-glass bonding unequal height process

    • “The relevant research team has made new progress in the field of microelectromechanical systems (MEMS). Experts have proposed and validated a miniaturized MEMS electrostatic driven micro mirror scheme based on silicon glass bonding unequal height technology, providing an efficient technical path for power consumption and size limitations in optical communication systems.”
    • Optics and Precision Engineering   Vol. 34, Issue 5, Pages: 734-742(2026)

    • DOI：10.37188/OPE.20263405.0734    

      CLC： TH703;TN304
    • CSTR：32169.14.OPE.20263405.0734    

    • Received：17 December 2025，

      Revised：2026-01-18，

      Published：10 March 2026

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  • LI Runlong,SUN Zhiyu,DU Chenzhe,et al.Low-voltage and compact MEMS micromirror based on double-mask silicon-glass bonding unequal height process[J].Optics and Precision Engineering,2026,34(05):734-742.

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