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Absolute angular displacement sensing principle and sensors based on time grating with extended spiral
Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-03-12

    • Absolute angular displacement sensing principle and sensors based on time grating with extended spiral

    • “Experts have proposed a method for epitaxial spiral shaped absolute grating angular displacement sensing, which provides a new solution to the problems of absolute encoding and ultra precision lithography processing in the design and processing of traditional absolute angular displacement sensors.”
    • Optics and Precision Engineering   Vol. 34, Issue 5, Pages: 784-793(2026)

    • DOI：10.37188/OPE.20263405.0784    

      CLC： TP212
    • CSTR：32169.14.OPE.20263405.0784    

    • Received：07 January 2026，

      Revised：2026-01-28，

      Published：10 March 2026

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  • CHEN Ziran,ZHANG Ziyi,ZHENG Yonghai,et al.Absolute angular displacement sensing principle and sensors based on time grating with extended spiral[J].Optics and Precision Engineering,2026,34(05):784-793.

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