Detection of ammonia gas at sub-ppb levels based on OF-CEAS

YUAN Shuaibo; CHENG Ziwei; ZHANG Zihao; YIN Runtao; ZHAO Gang; ZHOU Xiaobin; YANG Jiaqi; YAN Xiaojuan; MA Weiguang

doi:10.37188/OPE.20263407.1047

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Detection of ammonia gas at sub-ppb levels based on OF-CEAS

Modern Applied Optics | 更新时间：2026-04-10

- Detection of ammonia gas at sub-ppb levels based on OF-CEAS
- Optics and Precision Engineering Vol. 34, Issue 7, Pages: 1047-1056(2026)
- 作者机构：
  
  1.山西大学激光光谱研究所光量子技术与器件全国重点实验室，山西太原 030006
  2.山西大学极端光学协同创新中心，山西太原 030006
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20263407.1047
  CLC： O433.5;TH741
- CSTR：32169.14.OPE.20263407.1047
- Received：07 January 2026，
  
  Revised：2026-02-24，
  
  Published：10 April 2026
- 稿件说明：
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袁帅博,程子伟,张梓浩等.基于OF-CEAS的亚ppb量级氨气检测[J].光学精密工程,2026,34(07):1047-1056.

YUAN Shuaibo,CHENG Ziwei,ZHANG Zihao,et al.Detection of ammonia gas at sub-ppb levels based on OF-CEAS[J].Optics and Precision Engineering,2026,34(07):1047-1056.
袁帅博,程子伟,张梓浩等.基于OF-CEAS的亚ppb量级氨气检测[J].光学精密工程,2026,34(07):1047-1056. DOI： 10.37188/OPE.20263407.1047. CSTR： 32169.14.OPE.20263407.1047.

YUAN Shuaibo,CHENG Ziwei,ZHANG Zihao,et al.Detection of ammonia gas at sub-ppb levels based on OF-CEAS[J].Optics and Precision Engineering,2026,34(07):1047-1056. DOI： 10.37188/OPE.20263407.1047. CSTR： 32169.14.OPE.20263407.1047.

摘要

为了提高激光吸收光谱技术检测氨气的灵敏度与响应速度，采用光学反馈腔增强吸收光谱（Optical Feedback Cavity Enhanced Absorption Spectroscopy， OF-CEAS）技术，将6 612.7 cm

（1 512 nm）附近的氨气特征谱线作为目标吸收线，通过测量系统的温度和气体压力控制，有效提高了浓度测量的稳定性。实验结果表明，放置于温控箱中的光学系统实现了±0.005 ℃的温度控制精度。依托自主研发的高精度气压控制系统，可将腔内气压稳定在（30 000±1.5） Pa。基于该控制方案，在168 s 的积分时间下，氨气的检测极限低至12×10

，对应最小可探测吸收达到1.35×10⁻¹⁰ cm⁻¹。针对氨气分子易吸附于气室、管路内壁等诱发的响应延迟问题，采用的7.8 mL小腔体减小了分子滞留面积，关键管路与谐振腔内壁的硅烷钝化涂层降低了吸附，使系统平均响应时间缩短至196 s。本文为低浓度氨气的高精度、快速检测提供了可靠的解决方案。

Abstract

To enhance the sensitivity and response speed of ammonia detection using laser absorption spectroscopy， optical feedback cavity-enhanced absorption spectroscopy （OF-CEAS） was employed. The characteristic absorption line of ammonia near 6 612.7 cm⁻¹ （1 512 nm） was selected as the target transition. A V-shaped optical resonant cavity composed of three high-reflectivity mirrors was constructed， with a single-arm length of 20 cm. The ring-down time of the empty cavity was measured to be 48.12 μs， corresponding to a finesse of approximately 100 000 and an equivalent absorption path length of 14.4 km. System stability was significantly improved through precise control of temperature and gas pressure. The optical setup was housed in a temperature-controlled chamber with a stability of ±0.005 °C. In addition， a self-developed high-precision pressure control system maintained the intracavity pressure at （30 000±1.5） Pa. Under these conditions， a detection limit as low as 12 parts per trillion （ppt） was achieved at an integration time of 168 s， corresponding to a minimum detectable absorption coefficient of 1.35×10⁻¹⁰ cm⁻¹. To mitigate response delays caused by adsorption of ammonia molecules on the inner surfaces of the gas cell and pipelines， a miniaturized cavity with a volume of 7.8 mL was implemented to reduce molecular residence. Furthermore， silane passivation coatings were applied to critical pipeline sections and the inner cavity surface to suppress adsorption effects， resulting in a reduction of the average system response time to 196 s.

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references

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