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Error analysis and compensation method for dual-field coaxial alignment
Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-07-20

    • Error analysis and compensation method for dual-field coaxial alignment

    • Optics and Precision Engineering   Vol. 34, Issue 12, Pages: 1890-1903(2026)

    • DOI：10.37188/OPE.20263412.1890    

      CLC： TH74;TH166
    • CSTR：32169.14.OPE.20263412.1890    

    • Received：10 April 2026，

      Revised：2026-05-20，

      Online First：16 July 2026，

      Published：25 June 2026

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  • JIAO Shaowei,HUANG Pengpeng,YANG Xinglun,et al.Error analysis and compensation method for dual-field coaxial alignment[J].Optics and Precision Engineering,2026,34(12):1890-1903.

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