WU Hailiang,YANG Hui,MA Shanyi,et al.Influence of servo frequency on performance of ultra-precision machine tools[J].Optics and Precision Engineering,2026,34(16):2498-2511.
WU Hailiang,YANG Hui,MA Shanyi,et al.Influence of servo frequency on performance of ultra-precision machine tools[J].Optics and Precision Engineering,2026,34(16):2498-2511.DOI: 10.37188/OPE.20263416.2498. CSTR: 32169.14.OPE.20263416.2498.
Influence of servo frequency on performance of ultra-precision machine tools