王云庆, 李庆祥, 薛实福, 周兆英. 纳米级精度的线宽测量仪[J]. 光学精密工程, 1994,(1): 83-88

Wang Yunqing, Li Qingxiang, Xue Shifu, Zhou Zhaoying . A Linewidth Measuring Instrument with Nanometer Accuracy[J]. Editorial Office of Optics and Precision Engineering, 1994,(1): 83-88

王云庆, 李庆祥, 薛实福, 周兆英. 纳米级精度的线宽测量仪[J]. 光学精密工程, 1994,(1): 83-88 DOI：

Wang Yunqing, Li Qingxiang, Xue Shifu, Zhou Zhaoying . A Linewidth Measuring Instrument with Nanometer Accuracy[J]. Editorial Office of Optics and Precision Engineering, 1994,(1): 83-88 DOI：