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中科院长春光学精密机械研究所, 长春 130022
收稿日期:1998-02-20,
网络出版日期:1998-10-15,
纸质出版日期:1998-10-15
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付永启, 任延同. 提拉法涂胶的力学分析与模拟[J]. 光学精密工程, 1998,(5): 100-103
FU Yong-Qi, REN Yan-Tong . Dynamic Analysis of Dip Coating[J]. Editorial Office of Optics and Precision Engineering, 1998,(5): 100-103
付永启, 任延同. 提拉法涂胶的力学分析与模拟[J]. 光学精密工程, 1998,(5): 100-103 DOI:
FU Yong-Qi, REN Yan-Tong . Dynamic Analysis of Dip Coating[J]. Editorial Office of Optics and Precision Engineering, 1998,(5): 100-103 DOI:
用流体力学理论分析了提拉式涂胶过程中胶液的受力流动状态
推导出涂胶厚度与提升速度、胶液粘度等参数的理论关系式。经实际涂胶测定
该关系式反映的变化规律与实际是相符的。
Flowing form of resist forced by gravity during process of dip coating is analyzed in this paper. Relationship among parameters of pulling speed
viscosity & coated resist thickness have been deduced in the view of liquid dynamics. Measured by practical dip coating and experiment
the changing rule reflected by the theoretical results is coincide well with the measuring data.
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