Binary Laser Direct Writing System and Its Applications

LI Feng-you; LU Zhen-wu; XIE Yong-jun; ZHANG Dian-wen

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Binary Laser Direct Writing System and Its Applications

论文 | 更新时间：2020-08-12

- Binary Laser Direct Writing System and Its Applications
- Binary Laser Direct Writing System and Its Applications
- 光学精密工程 2001年9卷第5期页码：451-454
- 作者机构：
  
  Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences Changchun,China,130022
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TN249
- 收稿日期：2001-08-29，
  
  修回日期：2001-09-16，
  
  网络出版日期：2001-10-15，
  
  纸质出版日期：2001-10-15
- 稿件说明：
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LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. 光学精密工程, 2001,(5): 451-454

LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 451-454
LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. 光学精密工程, 2001,(5): 451-454 DOI：

LI Feng-you, LU Zhen-wu, XIE Yong-jun, ZHANG Dian-wen . Binary Laser Direct Writing System and Its Applications[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 451-454 DOI：

摘要

A new laser direct writing system is introduced and the potential application of the diffractive optical elements (DOE's) fabricated by applying laser direct writing system are presented. The fabrication techniques by applying the laser direct writing are developed. Experimental results have been obtained by applying laser direct writing machine with line width of 5μm and 10μm.

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