Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP

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- Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP
- Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP
- 光学精密工程 2001年9卷第5期页码：442-445
- 作者机构：
  
  State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130022, China
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TN305.7
- 收稿日期：2001-08-29，
  
  修回日期：2001-09-22，
  
  网络出版日期：2001-10-15，
  
  纸质出版日期：2001-10-15
- 稿件说明：
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CHEN Bo, NI Qi-liang, CAO Jian-lin . Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP[J]. 光学精密工程, 2001,(5): 442-445

CHEN Bo, NI Qi-liang, CAO Jian-lin . Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 442-445
CHEN Bo, NI Qi-liang, CAO Jian-lin . Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP[J]. 光学精密工程, 2001,(5): 442-445 DOI：

CHEN Bo, NI Qi-liang, CAO Jian-lin . Development of Debris-free Laser Plasma Sources for EUV Lithography in CIOMP[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 442-445 DOI：

We have been developing debris-free laser plasma sources for EUV lithography since 1996. Two types of debris-free sources

such as cryogenic target and gas-puff target laser plasma sources

were designed and built up in CIOMP. EUV radiation spectra of the sources with a variety of targets have been obtained by different ways.

We have been developing debris-free laser plasma sources for EUV lithography since 1996. Two types of debris-free sources

such as cryogenic target and gas-puff target laser plasma sources

were designed and built up in CIOMP. EUV radiation spectra of the sources with a variety of targets have been obtained by different ways.

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Current Status of EUV Lithography

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Laboratory-of Advanced Science-and Technology-for Industry Himeji Institute-of Technology, 3-1-2 Kouto, Kamigori, Ako-, Hyogo

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