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EUV Optical Design-Reflective and Diffractive Optics
论文 | 更新时间:2020-08-12
    • EUV Optical Design-Reflective and Diffractive Optics

    • EUV Optical Design-Reflective and Diffractive Optics

    • 光学精密工程   2001年9卷第5期 页码:411-417
    • 中图分类号: TH744
    • 收稿日期:2001-08-29

      修回日期:2001-10-08

      网络出版日期:2001-10-15

      纸质出版日期:2001-10-15

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  • Takeshi Namioka. EUV Optical Design-Reflective and Diffractive Optics[J]. 光学精密工程, 2001,(5): 411-417 DOI:

    Takeshi Namioka. EUV Optical Design-Reflective and Diffractive Optics[J]. Editorial Office of Optics and Precision Engineering, 2001,(5): 411-417 DOI:

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相关作者

Takeshi Namioka
Masato Koike
Shin Masui
ZHANG Xin
CHANG Jun
WENG Zhi-cheng
JIANG Hui-lin
CONG Xiao-jie

相关机构

Tohoku University, (home address) 4-2-221 Takamori, Izumi-, Sendai
A dvanced Photon Research Center, Kansai Research Establishment, Japan Atomic Energy Research Institute, 8-1 Umemidai, Kizu-cho, Souraku-, Kyoto
Research and Development Center, Sumitomo Heavy Industries, Ltd. 19 Natsushima-cho, Yokosuka, Kana}awa 237
The State Key Laboratory-of Applied Optics, Changchun Institute-of Optics Fine Mechanics and Physics, Chinese Academy of Sciences
Chungchun Institute of Optics and Fine Mechanics
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