基于光栅的快速精确图像拼接

陈世哲; 胡涛; 刘国栋; 谢凯; 刘炳国; 浦昭邦

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基于光栅的快速精确图像拼接

更新时间：2020-08-12

- 基于光栅的快速精确图像拼接
- Fast and precision image mosaic based on grating
- 光学精密工程 2006年14卷第2期页码：242-246
- 作者机构：
  
  哈尔滨工业大学自动化测试与控制系,黑龙江哈尔滨,150001
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TP391
- 收稿日期：2005-12-08，
  
  修回日期：2006-01-09，
  
  网络出版日期：2006-04-30，
  
  纸质出版日期：2006-04-30
- 稿件说明：
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陈世哲, 胡涛, 刘国栋, 等. 基于光栅的快速精确图像拼接[J]. 光学精密工程, 2006,14(2):242-246.

CHEN Shi-zhe, HU Tao, LIU Guo-dong, et al. Fast and precision image mosaic based on grating[J]. Optics and precision engineering, 2006, 14(2): 242-246.
陈世哲, 胡涛, 刘国栋, 等. 基于光栅的快速精确图像拼接[J]. 光学精密工程, 2006,14(2):242-246. DOI：

CHEN Shi-zhe, HU Tao, LIU Guo-dong, et al. Fast and precision image mosaic based on grating[J]. Optics and precision engineering, 2006, 14(2): 242-246. DOI：

摘要

为了提高IC芯片视觉检测中图像拼接的速度和精度

提出一种基于精密光栅运动系统的快速精确图像拼接技术。提出自标定技术解决了传统标定受标准件加工尺寸精度和光强影响的问题

提高了标定的准确度并降低了成本。在准确标定基础上

建立了基于光栅精确定位的拼接模型。实验表明

该方法拼接精度高

拼接平均误差在0.4 μm以内

为0.872 μm

达到亚像素级精度

而且拼接速度快

两幅图像拼接时间约为10 ms。

Abstract

In order to improve the speed and precision of image mosaic for IC vision inspection

a fast and accurate image mosaic technique based on precision grating measurement system was presented. The self-calibration method can solve the problem of conventional calibration affected by the manufacturing precision of standard unit and light intensity

and can increase the calibration accuracy and decrease the cost. After accurate calibration

the image mosaic model based on grating precision location was established. The experiments demonstrate that this system has high image mosaic precision

average error within 0.4 μm

and 0.872 μm in 2

which is up to sub-pixel precision; also the system has high mosaic speed

the time of two image mosaic is about 10 ms.

关键词

Keywords

references

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