应用在拼接镜面中的电容位移传感器的 结构性误差分析及校正

杨德华; 戚永军

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应用在拼接镜面中的电容位移传感器的结构性误差分析及校正

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- 应用在拼接镜面中的电容位移传感器的结构性误差分析及校正
- Structural error correction and simulation of capacitive displacement sensor for segmented mirrors
- 光学精密工程 2006年14卷第2期页码：173-179
- 作者机构：
  
  中国科学院国家天文台/南京天文光学技术研究所,江苏南京 210042
- 作者简介：
- 基金信息：
- DOI：
  中图分类号： TP212.12
- 收稿日期：2005-04-22，
  
  修回日期：2006-01-20，
  
  网络出版日期：2006-04-30，
  
  纸质出版日期：2006-04-30
- 稿件说明：
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杨德华, 戚永军. 应用在拼接镜面中的电容位移传感器的结构性误差分析及校正[J]. 光学精密工程, 2006,14(2):173-179.

YANG De-hua, QI Yong-jun. Structural error correction and simulation of capacitive displacement sensor for segmented mirrors[J]. Optics and precision engineering, 2006, 14(2): 173-179.
杨德华, 戚永军. 应用在拼接镜面中的电容位移传感器的结构性误差分析及校正[J]. 光学精密工程, 2006,14(2):173-179. DOI：

YANG De-hua, QI Yong-jun. Structural error correction and simulation of capacitive displacement sensor for segmented mirrors[J]. Optics and precision engineering, 2006, 14(2): 173-179. DOI：

摘要

分析了子镜运动和电容传感器极板运动之间的理论关系并探讨了电容位移传感器读数的"结构性"误差的处理方法。基于电容位移传感器的工作原理

对极板为圆形的电容位移传感器提出了采用以位移的测量值和子镜转角为自变量的多项式拟合的校正方法。计算表明该误差处理和校正方法是简洁可行的。对于转角的拟合只需2阶

同时位移测量值只需4阶的多项式进行拟合即可使输出位移达到3 nm的精度。进一步分析表明

直接使用位移传感器读数计算极板转角

并对误差的主动校正控制非常有利于该多项式拟合

可一次性达到优于5 nm的校正误差

完全满足拼接镜面主动光学工程应用的技术要求。

Abstract

Based on kinematics of the segment mirror system

the movement relationship between the segmented mirror and the sensor electrode plate was established

and processing method of the induced sensor reading error defined as structural error of the capacitive displacement sensor was analyzed. Thereafter

the capacitive sensor with round electrode plates in shape was specifically analysed for its reading in detail

which involved with numeric polynomial fitting technique in terms of measured displacement of the sensor and inclination angle of the electrode plate. The method has proved its efficient and effective in computer simulation. For the variable inclination angle

inclusion of the second order is enough to achieve 3 nm fitting precision

meanwhile

the fourth order is still needed for the variable measured displacement. Further analysis indicates that fiting the polynomial with the inclination angle directly obtained from the displacement sensors reading can still afford fitting precision of 5 nm at worst case

which well meets the technical requirements of the segmented mirror active optics application.

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Keywords

references

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