Surface Acoustic Wave(SAW) actuators have been dramatically required for a micro actuator not only due to their direct driving objects

low energy losses and drive errors

but also their higher work frequencies

shorter SAW waves

small dimensions

and low noises. In this paper

an applicable (SAW) micro actuator is implemented by fabricating microelectrodes on a LiNbO

3

substrate and by using MEMS technologies.In order to control the drive direction more effectively

a new type of IDT

Floating Electrode Unidirectional Transducer (FEUDT) is developed and the optimal designs are proposed and compared with others by ANSYS. The dimensions of the FEUDT are 5 mm in the aperture size

80 μm in the pitch

6.7 μm in the strip width

and 0.8 μm in the thickness. In comparison with other types of SAW actuators

the floating electrode unidirectional SAW actuator has a higher frequency vibration near to 50 MHz and more effectively controllable drive direction ability

which will be very useful for micro optical controlling systems in microminiaturization and controllability.