YIN Yong, WANG Shou-rong, WANG Cun-chao, et al. Driving-mode test of dual-mass MEMS gyroscope[J]. Optics and precision engineering, 2009, 17(6): 1355-1360.
YIN Yong, WANG Shou-rong, WANG Cun-chao, et al. Driving-mode test of dual-mass MEMS gyroscope[J]. Optics and precision engineering, 2009, 17(6): 1355-1360.DOI:
for double-linear vibrational dual-mass MEMS gyroscopes are insensitive to the environment
and their differential outputs can effectively suppress the common mode interference. On the basis of the structure and the principle of operation
the driving modal of the dual-mass gyro is analyzed in theory
and the simplified dynamic equations are proposed. Then
the finite element software ANSYS is used to numerically simulate the driving modal
and a driving circuit is used to test the driving modal of a fabricated gyro sample. By using several loading methods in simulations and tests
the amplitude-frequency curves are obtained. These results are in agreement with the theory analysis
which shows that dual-side driving method is better than single-side driving one
and the opposite-direction driving method can drive a dual-mass gyro in working mode. Simulation and experiment results verify the driving-mode characteristics of this dual-mass micro-gyro.