In order to realize the monolithically fabrication and control the gripping force

a novel four-arm structure single crystal silicon MEMS gripper integrated with force sensor is successfully developed using silicon bulk machining. Based on the technology of the piezoresistive detection

an effective technique of fabricating vertical sidewall piezoresistor in plane is used to fabricate the piezoresistor in the end of the end-effectors. Finite element analysis (FEA) is used to analyze the structure of the gripper and the flexible beams of the force sensors. The comb microactuator generates a linear horizontal motion

which is converted into rotational motion by an S-type flexible beam system to realize the gripping motion. Combined with the four-arm structure

the manipulating range is expanded. The bonding of the silicon and glass is used to realize the electrical isolation of the gripping arms. At the voltage of 80V

a deflection of the arm tip is 25靘 and the range of the operation is 30m-130靘. Testing results show that the maximum measurement range of the piezoresistive sensors is better than 1mN and the resolution is better than 3霳

which can be used effectively in the force feedback.