北京理工大学 光电学院,北京100081
梁宇环(2000-),女,河北石家庄人,硕士研究生,2023年于河北工业大学获得学士学位,主要研究方向为精密光学测量。Email:liangyuhuan0823@163.com
王 允(1984-),男,山东威海人,教授,2008年于北京理工大学获得学士学位,2013年于北京理工大学获得博士学位,主要从事精密光电测试与仪器研究。Email:alotrabbits@163.com
收稿:2026-04-08,
修回:2026-04-21,
纸质出版:2026-05-25
移动端阅览
梁宇环,吴中怀,汝洪武等.高精度差动对准动态测角瞄准误差抑制技术[J].光学精密工程,2026,34(10):1516-1525.
LIANG Yuhuan,WU Zhonghuai,RU Hongwu,et al.High-precision aiming error suppression technique for dynamic angle measurement based on differential alignment[J].Optics and Precision Engineering,2026,34(10):1516-1525.
梁宇环,吴中怀,汝洪武等.高精度差动对准动态测角瞄准误差抑制技术[J].光学精密工程,2026,34(10):1516-1525. DOI: 10.37188/OPE.20263410.1516. CSTR: 32169.14.OPE.20263410.1516.
LIANG Yuhuan,WU Zhonghuai,RU Hongwu,et al.High-precision aiming error suppression technique for dynamic angle measurement based on differential alignment[J].Optics and Precision Engineering,2026,34(10):1516-1525. DOI: 10.37188/OPE.20263410.1516. CSTR: 32169.14.OPE.20263410.1516.
高精度瞄准是测角的基准,决定了测角的精度,在精密测量领域中具有重要作用,针对瞄准过程中由于光斑畸变造成峰值光强点与能量质心分离影响瞄准精度的问题,提出一种高精度差动对准动态测角瞄准误差抑制技术。通过在探测器前加入双狭缝光阑对光斑进行整形滤波并获取双路光强信号,两路信号进行差分运算实现误差分离与信号补偿,根据差动对准光强响应曲线过零点的高灵敏性得到精确的光斑定位,消除光斑畸变对瞄准精度的影响。理论分析与初步实验结果表明:该技术可以有效抑制由于光斑畸变引起的瞄准误差,瞄准重复性可达0.03″,测角精度达到0.1″。与现有质心定位技术相比,该技术的瞄准重复性好、测角精度高,为高精度的动态激光测角系统提供了一种实用的技术方案。
High-precision aiming is the benchmark for angle measurement. It directly dictates the final measurement accuracy and is crucial in the precision measurement field. Dynamic aiming processes often suffer from optical spot distortion. This distortion separates the peak light intensity and energy centroid. Such spatial separation severely compromises overall aiming accuracy. We proposed an error suppression technique. It targeted high-precision dynamic laser angle measurement systems. Our method was based on differential alignment principles. A double-slit aperture was placed before the quadrant photodetector. The optical spot was systematically shaped and filtered. This setup acquired dual-channel light intensity signals. A differential operation processed these two distinct signals. This calculation achieved spatial error separation. It also provided dynamic optical signal compensation. The differential alignment curve featured a specific light intensity response. The zero-crossing point on this curve was highly sensitive. We utilized this extreme sensitivity for precise spot positioning. This mechanism fully eliminated the impact of optical spot distortion. Consequently, dynamic aiming accuracy remained completely unaffected. We conducted theoretical analysis and preliminary experimental verification. Tests utilized a standard prism on an air-bearing rotary system. Results prove this technique suppresses distortion-induced aiming errors. The optimized system achieves an aiming repeatability of 0.03″. The angle measurement accuracy reliably reaches 0.1″. We compared this approach with existing centroid location techniques. The proposed method offers superior aiming repeatability. It also guarantees higher angle measurement accuracy. This research provides a practical technical solution ideal for dynamic laser angle measurement applications.
WANG S T , MA R , CAO F F , et al . A review: high-precision angle measurement technologies [J]. Sensors , 2024 , 24 ( 6 ): 1755 . doi: 10.3390/s24061755 http://dx.doi.org/10.3390/s24061755
CHEN L , ZHU L , DU H , et al . Pointing acquisition and tracking system for free space optical communication based on integrated optical phased array [J]. IEEE Photonics Journal , 2025 , 17 ( 4 ): 7301608 . doi: 10.1109/jphot.2025.3582266 http://dx.doi.org/10.1109/jphot.2025.3582266
SIAUDINYTE L , HANSEN P E . Recent progress in optical nanometrology for the semiconductor industry [J]. Measurement: Sensors , 2025 , 38 : 101607 . doi: 10.1016/j.measen.2024.101607 http://dx.doi.org/10.1016/j.measen.2024.101607
李波 , 董文博 , 肖爱民 , 等 . 基于PSD的非接触式二维动态角度精密测量系统 [J]. 激光与红外 , 2021 , 51 ( 6 ): 787 - 796 .
LI B , DONG W B , XIAO A M , et al . High-precision non-contact two-dimensional dynamic angle measurement system based on PSD [J]. Laser & Infrared , 2021 , 51 ( 6 ): 787 - 796 . (in Chinese)
ZHANG Z Q , TONG S F , LIN P , et al . A μrad accuracy and nW detection sensitivity four-quadrant heterodyne coherent angular measurement system [J]. Photonics , 2025 , 12 ( 5 ): 509 . doi: 10.3390/photonics12050509 http://dx.doi.org/10.3390/photonics12050509
SUN S W , ZHENG Q , MENG X X , et al . High positional resolution pin-cushion position sensitive detector by deliberately introducing barrel distortion [J]. IEEE Sensors Journal , 2022 , 22 ( 2 ): 1280 - 1286 . doi: 10.1109/jsen.2021.3132379 http://dx.doi.org/10.1109/jsen.2021.3132379
ZHAO G B , BAN Y W , ZHANG Z H , et al . Error compensation strategy with high installation tolerance for angle encoders [J]. Precision Engineering , 2024 , 91 : 568 - 576 . doi: 10.1016/j.precisioneng.2024.10.017 http://dx.doi.org/10.1016/j.precisioneng.2024.10.017
朱均超 , 许虹虹 , 张海彤 , 等 . 基于激光自混合干涉的高精度角度测量方法 [J]. 激光与红外 , 2020 , 50 ( 1 ): 37 - 41 .
ZHU J C , XU H H , ZHANG H T , et al . High precision angle measurement method based on laser self-mixing interference [J]. Laser & Infrared , 2020 , 50 ( 1 ): 37 - 41 . (in Chinese)
MATSUKUMA H , ASUMI Y , NAGAOKA M , et al . An autocollimator with a mid-infrared laser for angular measurement of rough surfaces [J]. Precision Engineering , 2021 , 67 : 89 - 99 . doi: 10.1016/j.precisioneng.2020.09.022 http://dx.doi.org/10.1016/j.precisioneng.2020.09.022
BIAN Z L , GAO M , DONG Z R , et al . Two-coordinate dynamic photoelectric autocollimator based on single linear CCD [J]. Optical Metrology and Inspection for Industrial Applications , 2010 , 7855 : 78550H . doi: 10.1117/12.870026 http://dx.doi.org/10.1117/12.870026
MENG X X , SUN S W , YAN X T , et al . Six-degree-of-freedom posture measurement technologies using position sensitive detectors (PSDs): state of the art [J]. Micromachines , 2022 , 13 ( 11 ): 1903 . doi: 10.3390/mi13111903 http://dx.doi.org/10.3390/mi13111903
杨世栋 , 朱维斌 , 黄垚 , 等 . 一种动态测角仪瞄准误差抑制方法研究 [J]. 光电工程 , 2024 , 51 ( 12 ): 30 - 38 .
YANG S D , ZHU W B , HUANG Y , et al . Research on an aiming error suppression method for dynamic goniometer [J]. Opto-Electronic Engineering , 2024 , 51 ( 12 ): 30 - 38 . (in Chinese)
PAN N , ZHAO Q , WU Y P , et al . High-accuracy attitude angle measurement system using laser collimation [J]. Applied Optics , 2024 , 63 ( 19 ): F67 - F73 . doi: 10.1364/ao.522978 http://dx.doi.org/10.1364/ao.522978
ZHU X , LIU J , LI X , et al . High-precision laser angular displacement measurement based on an improved normalized algorithm for four-quadrant detector [J]. IEEE Transactions on Instrumentation and Measurement , 2024 , 73 : 5002110 .
张聪 , 刘文正 , 段发阶 , 等 . 长导轨五自由度测量中直线度精度提升方法与优化设计 [J]. 光学 精密工程 , 2022 , 30 ( 20 ): 2467 . doi: 10.37188/OPE.20223020.2467 http://dx.doi.org/10.37188/OPE.20223020.2467
ZHANG C , LIU W Z , DUAN F J , et al . Accuracy improvement method and optimal design of straightness in five-degreee-of-freedom measurement of long guide [J]. Opt. Precision Eng. , 2022 , 30 ( 20 ): 2467 . (in Chinese) . doi: 10.37188/OPE.20223020.2467 http://dx.doi.org/10.37188/OPE.20223020.2467
0
浏览量
0
下载量
0
CSCD
关联资源
相关文章
相关作者
相关机构
京公网安备11010802024621
