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1.College of Physics & Electronic Information, Luoyang Normal University, Luoyang 471000, China
2.Beijing Institute of Spacecraft Environmental Engineering, Beijing 100094, China
3.College of Optoelectronic Engineering, Chongqing University, Chongqing 400044, China
Published:15 January 2021,
Received:10 August 2020,
Revised:21 September 2020,
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杨数强,王军强,张超等.高Sc含量ScAlN薄膜的制备与表征[J].光学精密工程,2021,29(01):21-27.
YANG Shu-qiang,WANG Jun-qiang,ZHANG Chao,et al.Preparation and characterization of ScAlN thin film with high scandium concentration[J].Optics and Precision Engineering,2021,29(01):21-27.
杨数强,王军强,张超等.高Sc含量ScAlN薄膜的制备与表征[J].光学精密工程,2021,29(01):21-27. DOI: 10.37188/OPE.20212901.0021.
YANG Shu-qiang,WANG Jun-qiang,ZHANG Chao,et al.Preparation and characterization of ScAlN thin film with high scandium concentration[J].Optics and Precision Engineering,2021,29(01):21-27. DOI: 10.37188/OPE.20212901.0021.
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