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1.哈尔滨工业大学,黑龙江 哈尔滨 150001
2.中国科学院 高能物理研究所 中国科学院粒子天体物理重点实验室,北京 100049
Received:09 October 2020,
Revised:11 November 2020,
Published:15 August 2021
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王波,杨彦佶,王殿龙等.X射线聚焦镜的超精密制造[J].光学精密工程,2021,29(08):1839-1846.
WANG Bo,YANG Yan-ji,WANG Dian-long,et al.Ultra-precision manufacture of X-ray focusing mirror[J].Optics and Precision Engineering,2021,29(08):1839-1846.
王波,杨彦佶,王殿龙等.X射线聚焦镜的超精密制造[J].光学精密工程,2021,29(08):1839-1846. DOI: 10.37188/OPE.20212908.1839.
WANG Bo,YANG Yan-ji,WANG Dian-long,et al.Ultra-precision manufacture of X-ray focusing mirror[J].Optics and Precision Engineering,2021,29(08):1839-1846. DOI: 10.37188/OPE.20212908.1839.
X射线聚焦镜用于收集和汇聚宇宙中X射线辐射,是X射线天文卫星观测载荷的核心部件。本文采用镍基底电铸复制方法,在包括化学镀镍磷合金、模具超精密加工、模具镀膜、电铸镍基体以及脱模的全工艺链上进行了大量工艺探索和装备研发,并最终完成了X射线聚焦镜的批量超精密制造。实验结果表明,聚焦镜模具加工精度-表面粗糙度小于0.5 nm RMS,面形精度优于0.5 μm,镜片角分辨率为33.5″HPD(能量半高宽),验证了工艺的可靠性和先进性。
An X-ray focusing mirror is used to collect X-ray radiation in the universe, and is the core component of an X-ray astronomical satellite observation payload. In this study, process exploration and equipment research and development are conducted on the entire process chain (including electroless nickel-phosphorus alloy plating, mold ultra-precision machining, mold coating, electroforming nickel matrix, and demodulator) using the electroforming replication method of a nickel substrate, and finally, the batch ultra-precision manufacturing of X-ray focusing mirrors is completed. The results indicate that the surface roughness of the focusing lens mold processing precision is less than 0.5 nm RMS, surface shape precision is better than 0.5 m, and lens Angle resolution is 33.5″(half-power diameter), thus validating the reliability of the process. The study findings are expected to provide important technical support for China's space X-ray observation, break the foreign monopoly, and significantly improve China's astronomical observation ability in the field of high-energy celestial bodies.
帅平 , 陈绍龙 , 吴一帆 , 等 . X射线脉冲星导航技术及应用前景分析 [J]. 中国航天 , 2006 ( 10 ): 27 - 32 .
SHUAI P , CHEN SH L , WU Y F , et al . X-ray pulsar navigation technology and its application prospect analysis [J]. Aerospace China , 2006 ( 10 ): 27 - 32 . (in Chinese)
李惕碚 , 吴枚 . 空间硬X射线调制望远镜 [J]. 物理 , 2008 , 37 ( 9 ): 648 - 651 .
LI T B , WU M , WU M . The hard X-ray modulation telescope mission [J]. Physics , 2008 , 37 ( 9 ): 648 - 651 . (in Chinese)
袁为民 , 张臣 , 陈勇 , 等 . 爱因斯坦探针: 探索变幻多姿的X射线宇宙 [J]. 中国科学: 物理学 力学 天文学 , 2018 , 48 ( 3 ): 6 - 25 .
YUAN W M , ZHANG CH , CHEN Y , et al . Einstein Probe: Exploring the ever-changing X-ray Universe [J]. Scientia Sinica (Physica , Mechanica & Astronomica), 2018 , 48 ( 3 ): 6 - 25 . (in Chinese)
WEISSKOPF M C , TANANBAUM H D , SPEYBROECK L PVAN , et al . Chandra X-ray Observatory (CXO): overview [C]. X-Ray Optics , Instruments , and Missions III. Munich , Germany. SPIE, 2000 : 2 - 16 .
JANSEN F , LUMB D , ALTIERI B , et al . XMM-Newton observatory [J]. Astronomy & Astrophysics , 2001 , 365 ( 1 ): L1 - L6 .
MITSUDA K , BAUTZ M , INOUE H , et al . The X-ray observatory Suzaku [J]. Publications of the Astronomical Society of Japan , 2007 , 59 : S1 - S7 .
GENDREAU K C , ARZOUMANIAN Z , OKAJIMA T . The Neutron star Interior Composition ExploreR (NICER): an Explorer mission of opportunity for soft X-ray timing spectroscopy [C]. SPIE Astronomical Telescopes + Instrumentation. Proc SPIE 8443 , Space Telescopes and Instrumentation 2012: Ultraviolet to Gamma Ray , Amsterdam , Netherlands , 2012 , 8443 : 844313 .
PREDEHL P , BÖHRINGER H , BRUNNER H , et al . eROSITA on SRG [C]. in : Conference ProceedingsAIP , American Institute of Physics , 2010 : 543 - 548 .
LI T P . HXMT: a Chinese high-energy astrophysics mission [J]. Nuclear Physics B-Proceedings Supplements , 2007 , 166 : 131 - 139 .
YUAN W M , ZHANG C , FENG H , et al . Einstein Probe-a small mission to monitor and explore the dynamic X-ray Universe [EB/OL]. 2015: arXiv : 1506 .
07735[ astro-ph . HE] . https://arxiv.org/abs/1506.07735 https://arxiv.org/abs/1506.07735
ZHANG S , FEROCI M , SANTANGELO A , et al . eXTP: Enhanced X-ray Timing and Polarization mission [C]. in : Space Telescopes and Instrumentation 2016 : Ultraviolet to Gamma Ray , International Society for Optics and Photonics , 2017 : 99051 Q.
WEISSKOPF M C . Chandra X-ray optics [J]. Optical Engineering , 2012 : 011013 .
KUNIEDA H , AWAKI H , FURUZAWA A , et al . Hard X-ray telescope to be onboard ASTRO-H [C]. Space Telescopes and Instrumentation 2010 : Ultraviolet to Gamma Ray. San Diego , California , USA. SPIE , 2010 : 773214 .
SALMASO B , BASSO S , BRIZZOLARI C , et al . Production of thin glass mirrors by hot slumping for X-ray telescopes: present process and ongoing development [C]. SPIE Astronomical Telescopes+Instrumentation. Proc SPIE 9151 , Advances in Optical and Mechanical Technologies for Telescopes and Instrumentation, Montréal , Quebec , Canada . 2014 , 9151 : 91512W .
PARESCHI G , CITTERIO O , GHIGO M , et al . Nickel-replicated multilayer optics for soft and hard X-ray telescopes [C]. Astronomical Telescopes and Instrumentation. Proc SPIE 4012 , X-Ray Optics , Instruments , and Missions III, Munich , Germany . 2000 , 4012 : 284 - 293 .
RAMSEY B D , ELSNER R F , ENGELHAUPT D , et al . The development of hard X-ray optics at MSFC [C]. Optics for EUV , X-Ray , and Gamma-Ray Astronomy. San Diego , California , USA. SPIE, 2004 : 129 - 135 .
VERNANI D , BORGHI G , CALEGARI G , et al . Performance of a mirror shell replicated from a new flight quality mandrel for eROSITA mission [C]. Optics for EUV , X-Ray , and Gamma-Ray Astronomy V. San Diego , California , USA. SPIE, 2011 : 814707 .
强鹏飞 , 盛立志 , 李林森 , 等 . X射线聚焦望远镜光学设计 [J]. 物理学报 , 2019 , 68 ( 16 ): 158 - 163 .
QIANG P F , SHENG L ZH , LI L S , et al . Optical design of X-ray focusing telescope [J]. Acta Physica Sinica , 2019 , 68 ( 16 ): 158 - 163 . (in Chinese)
赵子健 , 王于仨 , 张留洋 , 等 . Wolter-Ⅰ型聚焦镜X射线光学实验与仿真 [J]. 光学 精密工程 , 2019 , 27 ( 11 ): 2330 - 2336 .
ZHAO Z J , WANG Y S , ZHANG L Y , et al . Experiments and simulation of X-ray optical Wolter-Ⅰ focusing mirror [J]. Opt. Precision Eng. , 2019 , 27 ( 11 ): 2330 - 2336 . (in Chinese)
王永刚 , 崔天刚 , 马文生 , 等 . Wolter-Ⅰ型掠入射反射镜的加工 [J]. 光学 精密工程 , 2011 , 19 ( 4 ): 743 - 753 .
WANG Y G , CUI T G , MA W SH , et al . Wolter-Ⅰ grazing incidence mirror processing [J]. Opt. Precision Eng. , 2011 , 19 ( 4 ): 743 - 753 . (in Chinese)
刘娜 , 沈正祥 , 马彬 , 等 . 圆锥近似Wolter-Ⅰ型X射线望远镜用柱面反射镜面形误差检测方法 [J]. 红外与激光工程 , 2018 , 47 ( 4 ): 0417001 .
LIU N , SHEN ZH X , MA B , et al . Figure error measurement method of cylindrical reflection mirror for conic approximate Wolter-Ⅰ X-ray type telescope [J]. Infrared and Laser Engineering , 2018 , 47 ( 4 ): 0417001 . (in Chinese)
乔政 , 刘玉涛 , 吴言功 , 等 . 辊筒模具超精密机床系统设计与工艺 [J]. 光学 精密工程 , 2018 , 26 ( 7 ): 1661 - 1671 .
QIAO ZH , LIU Y T , WU Y G , et al . Design and process of ultra-precision drum roll lathe [J]. Opt. Precision Eng. , 2018 , 26 ( 7 ): 1661 - 1671 . (in Chinese)
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