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1.Key Laboratory of Testing Technology for Manufacturing Process,Minsitry of Education, School of Manufacturing Science and Engineering, Southwest University of Science and Technology, Mianyang 621010, China
2.School of Mechanical Engineering, Xi'an Jiaotong University, Xi'an 710049, China
Published:25 August 2022,
Received:04 April 2022,
Revised:16 June 2022,
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李俊忠,廖晓波,许世林等.仿生纤毛微流量传感器及其制备方法[J].光学精密工程,2022,30(16):1968-1977.
LI Junzhong,LIAO Xiaobo,XU Shilin,et al.Bionic cilia micro flow sensor and its preparation method[J].Optics and Precision Engineering,2022,30(16):1968-1977.
李俊忠,廖晓波,许世林等.仿生纤毛微流量传感器及其制备方法[J].光学精密工程,2022,30(16):1968-1977. DOI: 10.37188/OPE.20223016.1968.
LI Junzhong,LIAO Xiaobo,XU Shilin,et al.Bionic cilia micro flow sensor and its preparation method[J].Optics and Precision Engineering,2022,30(16):1968-1977. DOI: 10.37188/OPE.20223016.1968.
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