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1.Jihua Laboratory, Foshan 528000, China
2.National Engineering Research Centre for High Efficiency Grinding, College of Mechanical and Vehicle Engineering, Hunan University, Changsha 410082, China
Published:10 January 2023,
Received:29 July 2022,
Revised:22 August 2022,
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曾沛,舒志文,陈艺勤等.宽束离子束刻蚀快速加工金属纳米间隙结构[J].光学精密工程,2023,31(01):109-118.
ZENG Pei,SHU Zhiwen,CHEN Yiqin,et al.Rapid fabrication of metallic nanogap structures by shower ion beam etching[J].Optics and Precision Engineering,2023,31(01):109-118.
曾沛,舒志文,陈艺勤等.宽束离子束刻蚀快速加工金属纳米间隙结构[J].光学精密工程,2023,31(01):109-118. DOI: 10.37188/OPE.20233101.0109.
ZENG Pei,SHU Zhiwen,CHEN Yiqin,et al.Rapid fabrication of metallic nanogap structures by shower ion beam etching[J].Optics and Precision Engineering,2023,31(01):109-118. DOI: 10.37188/OPE.20233101.0109.
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