Influence of frequency mixing on measurement accuracy of full-field heterodyne dynamic interferometer

YANG Yuqi; LI Yang; LÜ Tong; ZHANG Wenxi; WU Zhou

doi:10.37188/OPE.20233109.1267

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Influence of frequency mixing on measurement accuracy of full-field heterodyne dynamic interferometer

Modern Applied Optics | 更新时间：2023-05-15

- Influence of frequency mixing on measurement accuracy of full-field heterodyne dynamic interferometer
- Optics and Precision Engineering Vol. 31, Issue 9, Pages: 1267-1276(2023)
- 作者机构：
  
  1.中国科学院空天信息创新研究院，北京 100094
  2.中国科学院大学光电学院，北京 100094
- 作者简介：
- 基金信息：
- DOI：10.37188/OPE.20233109.1267
  CLC： O439;TH74
- Received：08 December 2022，
  
  Revised：05 January 2023，
  
  Published：10 May 2023
- 稿件说明：
移动端阅览
杨宇琦,李杨,吕彤等.混频对全视场外差动态干涉仪测量精度的影响[J].光学精密工程,2023,31(09):1267-1276.

YANG Yuqi,LI Yang,LÜ Tong,et al.Influence of frequency mixing on measurement accuracy of full-field heterodyne dynamic interferometer[J].Optics and Precision Engineering,2023,31(09):1267-1276.
杨宇琦,李杨,吕彤等.混频对全视场外差动态干涉仪测量精度的影响[J].光学精密工程,2023,31(09):1267-1276. DOI： 10.37188/OPE.20233109.1267.

YANG Yuqi,LI Yang,LÜ Tong,et al.Influence of frequency mixing on measurement accuracy of full-field heterodyne dynamic interferometer[J].Optics and Precision Engineering,2023,31(09):1267-1276. DOI： 10.37188/OPE.20233109.1267.

摘要

全视场外差动态干涉仪在面形测量方面具有测量精度高、抗干扰能力强等优点，适合用于长焦距面形的动态干涉测量以及大口径光学元件的测量。但是干涉仪系统内部光学元件性能不理想以及元件装配存在误差等，会在干涉光路中引入频率混叠，影响干涉仪的测量精度。为了分析混频对全视场外差动态干涉仪测量精度的影响，从混频产生的原因出发，建立了由混频引入的测量误差的理论模型，分析了混频程度对测量精度的影响，分析结果表明，测量误差与混频程度呈非线性正相关，混频会造成测量面形结果上叠加一个和干涉条纹相同频率的周期性误差。搭建了全视场外差动态干涉测量实验系统，验证了不同混频程度对面形测量精度的影响，当混频程度为0.029时，面形测量误差为0.053

；当混频程度为0.120时，面形测量误差为0.110

，与仿真分析结果吻合。本文的研究对研制高精度全视场外差动态干涉仪具有实际意义。

Abstract

The full-field heterodyne dynamic interferometer has the advantages of a high measurement accuracy and strong anti-interference ability for surface shape measurement. It is suitable for large-focal length surface shape measurement and the measurement of large-aperture optical elements. However， the performance of the optical components in the interferometer system is not ideal， and there are errors in the assembly of components， which introduce frequency aliasing in the interferometer optical path and affect the measurement accuracy of the interferometer. To analyze the influence of frequency mixing on the measurement accuracy of the full-field heterodyne dynamic interferometer， a theoretical model of the measurement error introduced by frequency mixing is established according to the causes of frequency mixing， and the influence of the frequency mixing degree on the measurement accuracy is analyzed. The results indicate that the measurement error is nonlinearly and positively correlated with the degree of mixing and that the mixing causes a periodic error with the same frequency as the interference fringe on the measured surface shape. In this study， a full-field heterodyne dynamic interferometry experimental system is established to examine the effects of different mixing degrees on the surface measurement accuracy. When the mixing frequency is 0.029， the surface shape measurement error is 0.053λ. When the mixing frequency is 0.120， the surface shape measurement error is 0.110λ. The experimental results are consistent with the simulation results. The research presented in this paper has practical significance for the development of high-precision full-field heterodyne dynamic interferometers.

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Related Author

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Related Institution

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