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Development of bi-directional high overload silicon-based differential pressure sensitive element
Micro\/Nano Technology and Fine Mechanics | 更新时间：2026-09-11

    • Development of bi-directional high overload silicon-based differential pressure sensitive element

    • Optics and Precision Engineering   Vol. 33, Issue 2, Pages: 209-219(2025)

    • DOI：10.37188/OPE.20253302.0209    

      CLC： TP212
    • CSTR：32169.14.OPE.20253302.0209    

    • Received：25 October 2024，

      Revised：2024-12-26，

      Published：25 January 2025

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  • DU Liqun,LI Aoqi,LI Meng,et al.Development of bi-directional high overload silicon-based differential pressure sensitive element[J].Optics and Precision Engineering,2025,33(02):209-219.

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