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Low signal-to-noise ratio spectral interferometry film thickness measurement based on self-attention neural network
Modern Applied Optics | 更新时间：2025-07-04

    • Low signal-to-noise ratio spectral interferometry film thickness measurement based on self-attention neural network

    • “在薄膜厚度测量领域，专家提出了基于自注意力神经网络的测量方法，有效提升低信噪比光谱数据的测量稳定性。”
    • Optics and Precision Engineering   Vol. 33, Issue 9, Pages: 1341-1352(2025)

    • DOI：10.37188/OPE.20253309.1341    

      CLC： TH741
    • CSTR：32169.14.OPE.20253309.1341    

    • Received：03 March 2025，

      Revised：25 March 2025，

      Published：10 May 2025

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  • WANG Chen,WANG Zizheng,LIU Zhaoran,et al.Low signal-to-noise ratio spectral interferometry film thickness measurement based on self-attention neural network[J].Optics and Precision Engineering,2025,33(09):1341-1352. DOI： 10.37188/OPE.20253309.1341. CSTR： 32169.14.OPE.20253309.1341.

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