Design and performance testing of 200-element silicon unimorph deformable mirror

MA Jian-qiang; LIU Ying; CHEN Jun-jie; LI Bao-qing; CHU Jia-ru

doi:10.3788/OPE.20142208.2047

您当前的位置：

首页 >

文章列表页 >

Design and performance testing of 200-element silicon unimorph deformable mirror

更新时间：2020-08-13

- Design and performance testing of 200-element silicon unimorph deformable mirror
- Optics and Precision Engineering Vol. 22, Issue 8, Pages: 2047-2053(2014)
- 作者机构：
  
  1. 中国科学技术大学精密机械与精密仪器系,安徽合肥,230027
  2. 宁波大学机械工程与力学学院,浙江宁波,315211
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142208.2047
  CLC： P111;TN384
- Received：18 November 2013，
  
  Revised：30 December 2013，
  
  Published：25 August 2014
- 稿件说明：
移动端阅览
马剑强, 刘莹, 陈俊杰等. 200单元硅基单压电变形镜的设计与测试[J]. 光学精密工程, 2014,22(8): 2047-2053

MA Jian-qiang, LIU Ying, CHEN Jun-jie etc. Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2047-2053
马剑强, 刘莹, 陈俊杰等. 200单元硅基单压电变形镜的设计与测试[J]. 光学精密工程, 2014,22(8): 2047-2053 DOI： 10.3788/OPE.20142208.2047.

MA Jian-qiang, LIU Ying, CHEN Jun-jie etc. Design and performance testing of 200-element silicon unimorph deformable mirror[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2047-2053 DOI： 10.3788/OPE.20142208.2047.

摘要

针对天文望远镜对变形镜的需求，设计了200单元级硅基单压电变形镜并对其进行了性能测试。首先，通过有限元方法对单压电变形镜进行结构建模，分析比较了电极排列形式和边界支撑方式对变形镜性能的影响。然后，制备了3款200单元变形镜样机（环形简支，环形固支，六边形简支）。最后，利用干涉仪测量了变形镜的影响函数，并通过激光多普勒测振仪测量其频响特性。仿真与实验结果表明：致动器在50 V电压下变形量可达1 μm，固支条件下谐振频率在1 kHz左右，对前100项Zernike像差具有良好的校正能力。该变形镜在低成本天文自适应光学系统中具有应用潜力。

Abstract

According to the requirements of astronomical telescopes for Deformable Mirrors (DMs)

a silicon unimorph DM with 200 elements were designed and its characteristics were measured. Firstly

the structure model of unimorph DM was developed using finite element method. The influences of the electrode arrangement and the boundary support of the DM on correction capability were investigated. Then

three prototype DMs (annular & simply support

annular & clamped support

and hexagonal & simply support) were fabricated. The influence functions of the fabricated DMs were measured using an interferometer. And the frequency response was measured using a laser Dopplar vibrometer. The simulation and experimental results indicate that the deflection of the actuator is more than 1 μm at 50 V and the resonance frequency of the DM with clamped boundary is about 1 kHz. The DMs have a well correction capability for the first 100 Zernike aberrations. These show that the developed DMs have potential applications for low-cost adaptive optics in astronomy.

关键词

Keywords

references

姜文汉. 自适应光学技术 [J]. 自然杂志, 2006, 28(1): 7-13. JIANG W H. Adaptive optical technology [J]. Chinese Journal of Nature, 2006, 28(1):7-13. (in Chinese)

LENA P. Adaptive optics: a breakthrough in astronomy [J]. Experimental Astronomy, 2009, 26: 35-48.

MADEC P Y. Overview of deformable mirror technologies for adaptive optics and astronomy [J]. SPIE, 2012, 8447:844705-1-18.

BIFANO T. Adaptive imaging MEMS deformable mirrors [J]. Nature Photonics, 2011, 5(1):21-23.

BIASI R, ANDRIGHETTONI M, ANGERER G, et al.. VLT deformable secondary mirror: integration and electromechanical tests results [J]. SPIE, 2012, 8447(84470G): 1-10.

林旭东, 刘欣悦, 王建立, 等. 137单元变形镜的性能测试及校正能力实验 [J]. 光学精密工程, 2012,21(1):267-273. LIN X D, LIU X Y, WANG J L, et al.. Performance test and experiment of correction capability of 137-element deformable mirror [J]. Opt. Precision Eng., 2012. 21(1): 267-273. (in Chinese)

林旭东, 薛陈, 刘欣悦, 等. 自适应光学波前校正器技术发展现状 [J]. 中国光学, 2012,4:337-351. LIN X D,XUE CH,LIU X Y. Current status and research development of wavefront correctors for adaptive optics [J]. Chinese Optic, 2012,4:337-351.

OYA S, BOUVIER A, GUYON O, et al.. Performance of the deformable mirror for Subaru LGSAO [J]. SPIE, 2006, 6272: U1573-U1580.

周虹, 宁禹, 官春林, 等. 双压电片变形反射镜样镜的设计与研制 [J]. 光学学报, 2009, 29(6): 1437-1442. ZHOU H, NING Y, GUAN CH L, et al.. Design and fabrication of prototype of bimorph deformable mirror [J]. Acta Optica Sinica, 2009, 29(6): 1437-1442. (in Chinese)

MA J Q, LIU Y, HE T, et al.. Double drive modes unimorph deformable mirror for low-cost adaptive optics [J]. Applied Optics, 2011, 50(29): 5647-5654.

刘莹, 马剑强,何挺, 等. 模拟退火-爬山混合算法用于无波前传感器快速像差校正 [J]. 光学精密工程, 2012, 20(2): 213-219. LIU Y, MA J Q, HE T, et al.. Hybrid simulated annealing-hill climbing algorithm for fast aberration correction without wavefront sensor [J]. Opt. Precision Eng., 2012, 20(2): 213-219. (in Chinese)

VERPOORT S, WITTROCK U. Actuator patterns for unimorph and bimorph deformable mirrors [J]. Applied Optics, 2010, 49(31):G37-G46.

NING Y, JIANG W H, RAO CH H, et al.. Response function calculation and sensitivity comparison analysis of various bimorph deformable mirrors [J]. Optics Express, 2009, 15(19): 12030-12038.

ZHU L J, SUN P C, BARTSCH D U, et al.. Wave-front generation of Zernike polynomial modes with a micromachined membrane deformable mirror [J]. Applied Optics, 1999, 38(28): 6019-6026.

MA J Q, LIU Y, HU Y L, et al.. Low-cost unimorph deformable mirror with high actuator count for astronomical adaptive optics [J]. Optical Engineering, 2013, 52(1): 016602.

TIMOSHENKO S, WOINOWSKY-KRIEGER S. Theory of Plates and Shells [M]. New York:McGraw-Hill,1995.

Views

375

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Design of high voltage amplifier for thousand-element adaptive piezoelectric deformable mirror

Hybrid simulated annealing-hill climbing algorithm for fast aberration correction without wavefront sensor

Wavefront sensing for FSO systems based on projected pupil plane pattern

Design and performance analysis of high-voltage drive system for thousand-element adaptive optics

Optical system design of calibration light source in 0.05-0.1 MPa wide atmospheric pressure environment

Related Author

LI Hongwen

YAO Kainan

Yang Leqiang

DENG Yongting

SHAO Meng

LIU Ying

MA Jian-qiang

HE Ting

Related Institution

Changchun Institute of Optics，Fine Mechanics and Physics，Chinese Academy of Sciences

Hebei Hanguang Industry Co.， LTD

College of Advanced Interdisciplinary Studies， National University of Defense Technology

Nanhu Laser Laboratory， National University of Defense Technology

School of Opto-Electronic Engineering， Changchun University of Science and Technology

AI问答

Address：No.3888 Dong Nanhu Road, Changchun, Jilin, China Postal code：130033
Tel：0431-86176855 Email：gxjmgc@ciomp.ac.cn
Technical support is provided by Beijing Founder electronics co., LTD 吉ICP备11002662号-17 京公网安备11010802024621
It is recommended to read the content of this site in Chrome&IE9+. Please switch to extreme mode in browser 360.
Cookies We use cookies to help provide and enhance our service and tailor content. By continuing, you agree to the use of cookies.

⁰