Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering

YE Xiong-ying; LI Zi-shang; FENG Jin-yang; MA Zeng-shuai

doi:10.3788/OPE.20142208.2096

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Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering

更新时间：2020-08-13

- Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering
- Optics and Precision Engineering Vol. 22, Issue 8, Pages: 2096-2102(2014)
- 作者机构：
  
  清华大学精密仪器系精密测试技术及仪器国家重点实验室北京,100084
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142208.2096
  CLC： TQ320
- Received：27 January 2014，
  
  Revised：27 February 2014，
  
  Published：25 August 2014
- 稿件说明：
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叶雄英, 李子尚, 冯金扬等. 基于二氧化硅溅射的PMMA和PDMS亲水改性[J]. 光学精密工程, 2014,22(8): 2096-2102

YE Xiong-ying, LI Zi-shang, FENG Jin-yang etc. Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2096-2102
叶雄英, 李子尚, 冯金扬等. 基于二氧化硅溅射的PMMA和PDMS亲水改性[J]. 光学精密工程, 2014,22(8): 2096-2102 DOI： 10.3788/OPE.20142208.2096.

YE Xiong-ying, LI Zi-shang, FENG Jin-yang etc. Hydrophilic modification of PMMA and PDMS based on silicon dioxide sputtering[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2096-2102 DOI： 10.3788/OPE.20142208.2096.

摘要

为了提高以聚甲基丙烯酸甲酯（PMMA）和聚二甲基硅氧烷（PDMS）为材料的微流体通道的浸润性，通过溅射SiO

对PMMA和PDMS进行了表面亲水改性处理。首先，对PMMA和PDMS进行氧等离子刻蚀，改变其表面形貌;然后，溅射SiO

进行表面亲水改性处理，由不同溅射时间得到不同厚度的SiO

薄膜。在亲水处理后一段时间之内对PMMA和PDMS表面分别进行接触角测量，评价不同条件下的改性效果，并对改性后的样片进行黏接性测试。结果表明：氧等离子刻蚀后，溅射时间10 min以上的PMMA表面可在10天内保持极亲水的状态；溅射时间15 min后的PMMA在35天之内接触角不超过10°；PDMS的亲水性可保持10天，接触角不超过60°；高温老化处理能延缓PDMS表面疏水性的恢复。实验结果显示：氧等离子刻蚀之后，溅射SiO

的方法可使PMMA和PDMS获得较长时间的表面亲水改性效果。另外，亲水改性处理后的PDMS之间仍可实现有效黏接，改性PMMA与未改性PDMS也能有效黏接。

Abstract

To improve the wettability of micro channels made of Polymethyl Methacrylate(PMMA) and Polydimethylsiloxane(PDMS)

the wettability of PMMA and PDMS surfaces was modified through sputtering silicon dioxide. Firstly

the surfaces of PMMA and PDMS were etched with an oxygen plasma to change their surface morphologies and enhance the roughnesses. Then

a thin layer of silicon dioxide was sputtered on their surfaces for hydrophilic modification and the silicon dioxide layers with different thicknesses were obtained by different sputtering time. The contact angles of the PMMA and PDMS surfaces were measured within a period of time after the hydrophilic treatment

and the effects of hydrophilic modification under different conditions were evaluated. Finally the adhesivity of the modified samples was tested too. The experimental results show that the surface of PMMA after oxygen plasma etching remains extremely hydrophilcity during 10 days via 10 min dioxide sputtering

and the contact angle remains lower than 10° in 35 days with 15 min sputtering. The modified PDMS remains hydrophilcity and the contact angle lower than 60° for 10 days. The aging treatment delays the recovering of the hydrophobicity of PDMS. By silicon dioxide sputtering

the PMMA and PDMS after oxygen plasma etching achieves longer hydrophilic modification efficiency. Moreover

after hydrophilic modification

both modified PMMAs

or pristine PDMS and modified PDMS could be bonded effectively.

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Keywords

references

于海霞, 栗大超, 刘同坤, 等. 基于微流体技术的组织液透皮抽取装置[J]. 光学精密工程, 2011, 19(3): 651-656. YU H X, LI D C, LIU T K, et al.. Interstitial fluid transdermal extraction tool based on microfluidics technology [J]. Opt. Precision Eng., 2011, 19(3): 651-656. (in Chinese)

杨潞霞, 郝晓剑, 王春水, 等. 具有三维聚焦功能的微流控芯片[J]. 光学精密工程, 2013, 21(9): 2309-2316. YANG L X, HAO X J, WANG CH SH, et al.. Three-dimensional focusing microfluidic chip [J]. Opt. Precision Eng., 2013, 21(9): 2309-2316. (in Chinese)

徐征, 王继章, 杨铎, 等. 辅助溶剂对PMMA微流控芯片模内键合的影响[J]. 光学精密工程, 2012,20(2): 321-328. XU ZH, WANG J ZH, YANG D, et al.. Effect of assistant solvent on in-mold bonding of PMMA microfluidic chips [J]. Opt. Precision Eng., 2012,20(2): 321-328. (in Chinese)

SHINOHARA H, HORI T, UMEDA S, et al.. Integrated hydrophilic surface treatment system of vapor deposition polymerization and vacuum ultraviolet irradiation for chemical/biochemical microchips [J]. Microelectronic Engineering, 2011, 88(8): 2751-2754.

LAI J, SUNDERLAND B, XUE J, et al.. Study on hydrophilicity of polymer surfaces improved by plasma treatment[J]. Applied Surface Science, 2006, 252(10): 3375-3379.

VESEL A, MOZETIC M. Surface modification and ageing of PMMA polymer by oxygen plasma treatment [J]. Vacuum, 2012, 86(6): 634-637.

TAN S H, NGUYEN N T, CHUA Y C, et al.. Oxygen plasma treatment for reducing hydrophobicity of a sealed polydimethylsiloxane microchannel[J]. Biomicrofluidics, 2010, 4: 032204.

PRIEST C, GRUNER P J, SZILI E J, et al.. Microplasma patterning of bonded microchannels using high-precision "injected" electrodes[J]. Lab on a Chip, 2011, 11(3): 541-544.

SHINOHARA H, MIZUNO J, SHOJI S. Studies on low-temperature direct bonding of VUV, VUV/O3 and O2 plasma pretreated cyclo-olefin polymer[J]. Sensors and Actuators A: Physical, 2011, 165(1): 124-131.

BAUER W A C, FISCHLECHNER M, ABELL C, et al.. Hydrophilic PDMS microchannels for high-throughput formation of oil-in-water microdroplets and water-in-oil-in-water double emulsions [J]. Lab on a Chip, 2010, 10(14): 1814-1819.

LEE D, YANG S. Surface modification of PDMS by atmospheric-pressure plasma-enhanced chemical vapor deposition and analysis of long-lasting surface hydrophilicity [J]. Sensors and Actuators B: Chemical, 2012, 162(1): 425-434.

LI J, WANG X, CHENG C, et al.. Selective modification for polydimethylsiloxane chip by micro-plasma[J]. Journal of Materials Science, 2013, 48(3): 1310-1314.

OZAYDININCE G, COCLITE A M, GLEASON K K. CVD of polymeric thin films: applications in sensors, biotechnology, microelectronics/organic electronics, microfluidics, MEMS, composites and membranes [J]. Reports on Progress in Physics, 2012, 75(1): 016501.

RATNER B D. Surface modification of polymers: chemical, biological and surface analytical challenges[J]. Biosensors and Bioelectronics, 1995, 10(9): 797-804.

AZUMA A, AKIBA N, MINAKUCHI S. Hydrophilic surface modification of acrylic denture base material by silica coating and its influence on Candida albicans adherence[J]. Journal of Medical and Dental Sciences, 2012, 59: 1-7.

KITSARA M, NWANKIRE C, O'REILLY A, et al.. Hydrophilic polymeric coatings for enhanced, serial-siphon based flow control on centrifugal lab-on-a-disc platforms [J]. 2012.

KIM K, PARK S W, YANG S S. The optimization of PDMS-PMMA bonding process using silane primer [J]. BioChip Journal, 2010, 4(2): 148-154.

EDDINGTON D T, PUCCINELLI J P, BEEBE D J. Thermal aging and reduced hydrophobic recovery of polydimethylsiloxane [J]. Sensors and Actuators B: Chemical, 2006, 114(1): 170-172.

TSOUGENI K, TSEREPI A, CONSTANTOUDIS V, et al.. Plasma nanotextured PMMA surfaces for protein arrays: Increased protein binding and enhanced detection sensitivity [J]. Langmuir, 2010, 26(17): 13883-13891.

BODAS D, KHANMALEK C. Hydrophilization and hydrophobic recovery of PDMS by oxygen plasma and chemical treatment—an SEM investigation [J]. Sensors and Actuators B: Chemical, 2007, 123(1): 368-373.

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