Computer-aided alignment for reduced projection systems

XIE Yao; YU Jie; WANG Li-ping; WANG Hui; ZHOU Feng

doi:10.3788/OPE.20142208.2103

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Computer-aided alignment for reduced projection systems

更新时间：2020-08-13

- Computer-aided alignment for reduced projection systems
- Optics and Precision Engineering Vol. 22, Issue 8, Pages: 2103-2108(2014)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所应用光学国家重点实验室,吉林长春,130033
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142208.2103
  CLC： TH703;TP391.7
- Received：21 March 2014，
  
  Revised：10 April 2014，
  
  Published：25 August 2014
- 稿件说明：
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谢耀, 于杰, 王丽萍等. 微缩投影系统的计算机辅助装调[J]. 光学精密工程, 2014,22(8): 2103-2108

XIE Yao, YU Jie, WANG Li-ping etc. Computer-aided alignment for reduced projection systems[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2103-2108
谢耀, 于杰, 王丽萍等. 微缩投影系统的计算机辅助装调[J]. 光学精密工程, 2014,22(8): 2103-2108 DOI： 10.3788/OPE.20142208.2103.

XIE Yao, YU Jie, WANG Li-ping etc. Computer-aided alignment for reduced projection systems[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2103-2108 DOI： 10.3788/OPE.20142208.2103.

摘要

为了解决主次镜结构的微缩投影系统在计算机辅助装调过程中的补偿器耦合问题，实现补偿器的合理筛选，介绍了一种基于光学系统敏感矩阵奇异值分解的计算机辅助装调算法。建立了微缩投影系统装调模型，针对算法和模型开展了计算机辅助装调实验。用光学软件CODE V建立了光学系统模型，采用零位补偿器检测获得了非球面元件面形；基于灵敏度矩阵的分析结果指导微缩投影系统优化，并将优化后的结构参数作为系统光机结构机械装配和定位的基准。新建立的系统装调模型更接近实际装调过程，能更有效地指导装调，解决了补偿器间的耦合问题，加快了装调过程的收敛。最后，基于自行研发的高精度干涉仪完成了计算机辅助装调实验。实验显示系统波像差由46.39 nmRMS收敛至20.73 nmRMS，验证了装调算法和模型的准确性。

Abstract

To solve the coupling problem between the compensators during the computer-aided alignment of a reduced projection system with primary and secondary mirrors and to select the compensators properly

a computer-aided alignment algorithm based on singular value decomposition of an optical system sensitive matrix was described. An alignment model for the reduced projection system was established

and both of the algorithm and the model were accomplished in the experiment. An aspherical surface figure detected with a null lens was introduced into the CODE V optical model

the analysis of the sensitivity matrix was used to supervise the optimization of the optical system

and the optimized structural parameters were considered as the benchmark of the assembly and positioning of optical and mechanical system. The experiments show that the created system alignment model is closer to the actual alignment process

and efficiently supervises system alignment

solves the coupling problem between the compensators

and accelerates the convergence process. Finally

computer-aided alignment experiment was completed based on a self-developed interferometer with high precision.It shows that the system wavefront error is minished from 46.39 nmRMS to 20.73 nmRMS

which verifies the veracity of the algorithm and the alignment model.

关键词

Keywords

references

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