Ultra-precision grinding of hot-pressed zinc sulfide

CHEN Bing; GUO Bing; ZHAO Qing-liang; RAO Zhi-min; YAO Guang

doi:10.3788/OPE.20142208.2109

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Ultra-precision grinding of hot-pressed zinc sulfide

更新时间：2020-08-13

- Ultra-precision grinding of hot-pressed zinc sulfide
- Optics and Precision Engineering Vol. 22, Issue 8, Pages: 2109-2116(2014)
- 作者机构：
  
  1. 哈尔滨工业大学机电工程学院,黑龙江哈尔滨,150001
  2. 中国航天科技集团长征机械厂,四川成都,610100
- 作者简介：
- 基金信息：
- DOI：10.3788/OPE.20142208.2109
  CLC： TG580.6
- Received：02 December 2013，
  
  Revised：27 January 2014，
  
  Published：25 August 2014
- 稿件说明：
移动端阅览
陈冰, 郭兵, 赵清亮等. 热压硫化锌的超精密磨削加工[J]. 光学精密工程, 2014,22(8): 2109-2116

CHEN Bing, GUO Bing, ZHAO Qing-liang etc. Ultra-precision grinding of hot-pressed zinc sulfide[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2109-2116
陈冰, 郭兵, 赵清亮等. 热压硫化锌的超精密磨削加工[J]. 光学精密工程, 2014,22(8): 2109-2116 DOI： 10.3788/OPE.20142208.2109.

CHEN Bing, GUO Bing, ZHAO Qing-liang etc. Ultra-precision grinding of hot-pressed zinc sulfide[J]. Editorial Office of Optics and Precision Engineering, 2014,22(8): 2109-2116 DOI： 10.3788/OPE.20142208.2109.

摘要

针对用传统车削或研磨抛光方法加工大尺寸非球面热压硫化锌透镜存在的不足，采用金刚石砂轮磨削加工方法对热压硫化锌材料进行了加工实验。通过压痕、单颗粒金刚石刻划和磨削正交实验，研究了该方法在磨削加工过程中的塑性域去除机理及其亚表面损伤情况，并优化了超精密磨削加工工艺参数。压痕实验发现热压硫化锌材料在载荷作用下易于出现径向裂纹和微裂纹，其断裂韧性为2.643842 MPa/m

1/2

，临界切削深度为1.808 μm。单颗粒金刚石刻划实验结果表明，热压硫化锌材料在较小的切削深度下可以实现塑性域去除，但在机械去除过程中易出现多种形式的亚表层损伤。磨削实验结果表明，磨削深度是影响表面光洁度的主要因素，随着磨削深度的增大表面光洁度降低，最佳表面粗糙度为7.6 nm。工作台进给速度是影响面形精度的主要因素，且平面磨削的面形精度PV值为0.185~0.395 μm。研究结果表明，磨削加工热压硫化锌材料可以获得纳米级表面粗糙度。

Abstract

To overcome the shortcomings of traditional lapping and polishing methods in machining large size aspherical hot-pressed zinc sulfide lenses

a machining experiment on hot-pressed zinc sulfide materials was performed by diamond wheel grinding method.. The single-point diamond scratching and orthogonal grinding experiments were carried out to research the ductile regime removal mechanism and subsurface damage during machining hot-pressed zinc sulfide and to obtain optimal machining parameters. The results of micro-indentation experiment show that hot-pressed zinc sulfide materials under a load are easy to produce radial cracks and micro cracks

the toughness value is 2.643842 MPa/m

1/2

and the critical cutting depth is 1.808 μm. Based on the results of single-point diamond scratching

it verifies that hot-pressed zinc sulfide is removed in ductile regime at a smaller cutting depth although much kinds of subsurface damage will appear during machining process. The results of orthogonal grinding experiments demonstrate that the depth of grinding is a main influencing factor on surface roughness values

which decreases with decreasing depth of grinding

and the best value is 7.6 nm. The feed rate of the working table influences the surface figure precision PV values mostly

it offers the surface accuracy(PV) between 0.185 μm and 0.395 μm. These results show that the roughness of hot-pressed zinc sulfide surface by grinding has been up to nano level.

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references

罗贞礼. 红外光学材料硫化锌概览[J]. 新材料产业, 2012 (8): 41-44. LUO ZH L. An overview of the infrared optical material zinc sulfide [J]. Advanced Materials Industry, 2012 (8): 41-44. (in Chinese)

李跃龙, 黎建明, 苏小平, 等. 红外窗口和整流罩材料研究现状与发展趋势[J]. 人工晶体学报, 2007, 36(4): 877-884. LI Y L, LI J M, SU X P, et al.. Research trends and current status in infrared window and dome materials [J]. Journal of Synthetic Crystals, 2007, 36(4): 877-884. (in Chinese)

杜锦屏, 台玉萍. 纳米硫化锌的制备及应用研究新进展[J]. 化工时刊, 2012, 26(1): 45-48. DU J P, TAI Y P. Preparation and application of nanocrystalline zinc sulfide [J]. Chemical Industry Times, 2012, 26(1): 45-48. (in Chinese)

FU L L F, WANG X, et al.. Defects in CVDZnS[J]. Rare Metals, 2011, 30(4): 387-391.

谢晋, 耿安兵, 熊长新, 等. 红外线聚光非球面透镜的单点金刚石镜面切削方法[J]. 光学精密工程, 2004, 12(6): 566. XIE J,GENG A B,XIONG CH X, et al.. Single-point diamond mirror turning of infrared aspheric lens [J]. Opt. Precision Eng., 2004, 12(6): 566. (in Chinese)

史永杰, 郑堤, 王龙山, 等. 非球面精密数控研抛中研抛力的控制[J]. 光学精密工程, 2011, 19(5): 1013-1021. SHI Y J,ZHENG T, WANG L SH, et al.. Polishing force control in precise NC polishing of aspheric parts [J]. Opt. Precision Eng., 2011, 19(5): 1013-1021. (in Chinese)

戴欣平, 赵萍, 文东辉. 单晶蓝宝石的延性研磨加工[J]. 光学精密工程, 2012, 20(6): 1316-1324. DAI X P,ZHAO P, WEN D H. Ductile lapping of single crystal sapphire [J].Opt. Precision Eng., 2012, 20(6): 1316-1324. (in Chinese)

王毅, 倪颖, 余景池. 小型非球面数控抛光技术的研究[J]. 光学精密工程, 2007, 15(10): 1527-1533. WANG Y, NI Y, YU J CH, Computer-controlled polishing technology for small aspheric lens [J]. Opt. Precision Eng., 2007, 15(10): 1527-1533. (in Chinese)

BRINKSMEIER E, MUTLUG NES Y, KLOCKE F, et al.. Ultra-precision grinding[J]. CIRP Annals-Manufacturing Technology, 2010, 59(2): 652-671.

KUKS V G. Grinding aspheric surfaces of optical workpieces with a full-size tool[J]. Journal of Optical Technology, 2012, 79(3): 157-159.

NELSON J D G, DRUCKER J A, HAEFNER A A, et al.. Varying electro-kinetic interactions to achieve predictable removal rates and smooth surfaces on ZnS[C]. SPIE,2009, 7426: 74260A-1.

回长顺, 王永春. 热压硫化锌整流罩光学加工工艺研究[J]. 红外与激光技术, 1994,(4):10. HUI CH SH, WANG Y CH. Research on optical processing technology of hot-pressed zinc sulfide fairing [J]. Infrared and Laser Engineering, 1994,(4):10. (in Chinese)

陈琦, 付秀华, 贾宗合, 等. 硫化锌晶体加工工艺技术研究[J]. 长春理工大学学报, 2013,36(3-4):120-124. CHEN Q,FU X H,JIA Z H,et al.. Research on processing technology of ZnS crystal [J]. Journal of Changchun University of Science and Technology, 2013,36(3-4):120-124.(in Chinese)

包亦望, 邱岩, 卜晓雪. 陶瓷材料的力学性能评价新方法[J]. 稀有金属材料与工程, 2007, 36(A02): 347-350. BAO Y W, QIU Y, PU X X. A new method of mechanics performance evaluation for Ceramic materials [J]. Rare metal materials and engineering, 2007, 36(A02):347-350. (in Chinese)

LAUGIER M T. New formula for indentation toughness in ceramics [J]. Journal of materials science letters, 1987, 6(3): 355-356.

BIFANO T G. Ductile-regime grinding of brittle materials [d]. US:North Carolina State University, 1988.

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