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Optics and Precision Engineering

Optics and Precision Engineering Optics and Precision Engineering
  • Editor-in-Chief:Xuejun Zhang, Liangcai Cao
  • ISSN:1004-924X
  • eISSN:2097-3209
  • CN:22-1198/TH
  • Supervisor:Chinese Academy of Sciences
  • Sponsor:Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, China Instrument and Control Society
  • Publication frequency:Semimonthly
  • Tel.:0431-86176855
  • E-mail:gxjmgc@ciomp.ac.cn
  • Address:No.3888 Dong Nanhu Road, Changchun, Jilin, China
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Volume 33 期 9，2025 2025年33卷第9期

  • Modern Applied Optics

    “在薄膜厚度测量领域，专家提出了基于自注意力神经网络的测量方法，有效提升低信噪比光谱数据的测量稳定性。”

    WANG Chen, WANG Zizheng, LIU Zhaoran, YAO Chengyuan, HU Chunguang

    DOI：10.37188/OPE.20253309.1341
    摘要：To enhance the robustness of film thickness measurements from low signal-to-noise ratio （SNR） spectral data， a measurement approach based on a self-attention neural network （SANN） is developed. While the conventional Fourier transform method effectively measures thickness on high SNR data， its accuracy deteriorates as noise obscures the principal interference frequency under low SNR conditions， hindering precise thickness extraction. This study introduces a self-attention neural network model that takes spectral data as input and outputs film thickness， employing an adaptive attention mechanism to dynamically weight spectral points across different wavelengths， thereby improving analysis of low SNR spectral data. Experimental data were obtained using a spectral interference film thickness measurement system and subsequently augmented through wavelength drift and adaptive intensity normalization strategies to expand the dataset and enhance the model's generalization. Model optimization identified an architecture comprising eight encoder layers and 128 hidden nodes per layer.Using wafer measurements as a case study， evaluation on spectral data containing outliers demonstrated a maximum relative thickness measurement error of 3.62% on the low SNR validation set. These results indicate that the proposed method effectively suppresses noise influence， mitigates outlier deviations common in Fourier transform approaches， and substantially improves measurement stability. the applicability of the proposed method is validated to a broader range of thin film measurement scenarios.  
    关键词：interferometric measurement;wafer thickness;spectral interference;self-attention neural network;anti-noise ability;measurement robustness   
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    “在拼接式空间望远镜共相领域，专家提出了一种大范围、高精度、自动化的共相调校方法，为解决子镜共相问题提供解决方案。”

    XU Boqian, JU Guohao, GAO Yan, WANG Shuaihui, ZHANG Chunyue, KUANG Ye, DU Yimin, LU Zhirong, XU Shuyan

    DOI：10.37188/OPE.20253309.1353
    摘要：This paper presents a method for large-range， high-precision， and automated co-phasing alignment of segmented space telescopes. The approach satisfies the demands of millimeter-level range， nanometer-level precision， and operation without reliance on external interferometric measurement devices. Initially， the optical characteristics at various co-phasing stages-confocal alignment， coarse co-phasing， and fine co-phasing-are analyzed. Enhancements are made to the confocal alignment method， a coarse co-phasing detection technique based on a dispersion fringe sensor is developed， and a fine co-phasing detection method employing phase diversity is introduced. These advancements establish a comprehensive accuracy convergence chain for segmented mirror co-phasing alignment. Subsequently， an experimental system is constructed to validate the automated processes of confocal alignment， coarse co-phasing， and fine co-phasing. Experimental results demonstrate that when the relative position and orientation errors of sub-mirrors lie within ±0.5 mm and ±0.1°， respectively， the proposed method successfully achieves automated co-phasing. Following co-phasing， the system attains a wavefront error RMS better than 0.1λ（λ=632.8 nm）. The proposed co-phasing method provides a broad alignment range， high accuracy， and low resource consumption， rendering it highly promising for applications in segmented space telescopes.  
    关键词：space telescope;segmented;co-phasing alignment;dispersed fringe sensor;phase diversity   
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    “在车载平台激光外差太阳辐射光谱探测领域，研究者设计了一套高精度太阳跟踪系统，通过边缘计算和模型预测控制算法，实现了快速响应和稳定跟踪，满足了高精度跟踪需求。”

    FANG Ruopeng, LI Renshi, JIAO Ting, XU Zhenyu, DENG Hao, YAO Lu, HE Yabai, KAN Ruifeng

    DOI：10.37188/OPE.20253309.1365
    摘要：A solar tracking system tailored for mobile platforms has been developed to fulfill the requirement for high-precision solar position tracking in a vehicle-mounted laser heterodyne solar radiation spectrum detection system. This study transfers data processing tasks to an edge computing platform， significantly enhancing processing speed and ensuring rapid system response in dynamic environments. Concurrently， the integration of camera distortion correction and vision detection algorithms enables precise determination of the solar centroid position within the camera image and calculation of the angular offset. This angular offset serves as the system model's state variable， and the introduction of a model predictive control algorithm facilitates optimal control of the attitude adjustment motor speed， thereby markedly improving tracking accuracy and stability. Experimental results demonstrate a system response delay of only 14.6 ms， with tracking accuracies of 0.13° and 0.04° along the X- and Y-axes， respectively， when deployed on an onboard platform traveling at 15 km/h. The findings confirm that the designed solar tracking system combines high precision with low latency， meeting the stringent demands of heterodyne measurement for precise solar position tracking on vehicle platforms.  
    关键词：laser heterodyne;solar tracking;Model predictive control;image processing   
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    “在直接相位偏折测量领域，专家提出了补偿LCD和TD折射误差的新方法，有效提高了系统测量精度。”

    TIAN Xiuxiu, NI Yubo, MENG Zhaozong, GAO Nan, YANG Zeqing, ZHANG Guofeng, YIN Wei, ZHAO Hongwei, ZHANG Zonghua

    DOI：10.37188/OPE.20253309.1377
    摘要：In direct phase measuring deflectometric systems， the unique structure of liquid crystal displays （LCDs） and transparent displays （TDs） induces light refraction during measurements， resulting in phase deviations. This study presents a method to compensate for the refractive errors of these displays. By modeling the two displays as a single transparent layered structure， a ray tracing algorithm is employed to establish refraction error models throughout the measurement process. The light propagation paths are analyzed to identify the parameters necessary for correcting phase deviations. Subsequently， multi-stereo vision technology， combined with an optimized three-domain reflection algorithm， is utilized to calibrate the refraction parameters of the displays. Based on a geometric analysis of the system， the refraction angle during measurement is calibrated. Finally， an error compensation formula is derived and applied to correct the depth values pixel by pixel， enhancing measurement accuracy. Experimental results demonstrate that the proposed compensation method reduces the maximum absolute error between the mirror ring and the stepped surface from 33 µm to 21 µm， and decreases the root mean square error （RMSE） of the combined mirror assembly， comprising a concave and a plane mirror， from 38.55 µm to 24.92 µm. These improvements correspond to an overall enhancement of measurement accuracy by 30% to 40%. The method effectively mitigates refraction errors in the two displays and significantly improves the three-dimensional measurement precision of the system.  
    关键词：three-dimensional measurement;direct phase measuring deflectometry;liquid crystal display;transparent display;refraction error   
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