{"defaultlang":"zh","titlegroup":{"articletitle":[{"lang":"zh","data":[{"name":"text","data":"逐层微细电阻滑焊工艺制备三维微结构"}]},{"lang":"en","data":[{"name":"text","data":"Fabrication of 3D microstructure with layer-by-layer micro-electric resistance slip welding"}]}]},"contribgroup":{"author":[{"name":[],"stringName":[{"lang":"zh","surname":"徐斌","prefix":""},{"lang":"en","surname":"XU Bin","prefix":""}],"aff":[{"rid":"1780998","text":"1"},{"rid":"1781000","text":"3"}],"role":["first-author"],"deceased":false},{"name":[],"stringName":[{"lang":"zh","surname":"伍晓宇","prefix":""},{"lang":"en","surname":"WU Xiao-yu","prefix":""}],"aff":[{"rid":"1780998","text":"1"}],"role":[],"deceased":false},{"name":[],"stringName":[{"lang":"zh","surname":"雷建国","prefix":""},{"lang":"en","surname":"LEI Jian-guo","prefix":""}],"aff":[{"rid":"1780998","text":"1"}],"role":[],"deceased":false},{"name":[],"stringName":[{"lang":"zh","surname":"罗烽","prefix":""},{"lang":"en","surname":"LUO Feng","prefix":""}],"aff":[{"rid":"1780998","text":"1"}],"role":[],"deceased":false},{"name":[],"stringName":[{"lang":"zh","surname":"龚峰","prefix":""},{"lang":"en","surname":"GONG Feng","prefix":""}],"aff":[{"rid":"1780998","text":"1"}],"role":[],"deceased":false},{"name":[],"stringName":[{"lang":"zh","surname":"杜晨林","prefix":""},{"lang":"en","surname":"DU Chen-lin","prefix":""}],"aff":[{"rid":"1780999","text":"2"}],"role":[],"deceased":false},{"name":[],"stringName":[{"lang":"zh","surname":"阮双琛","prefix":""},{"lang":"en","surname":"RUAN Shuang-chen","prefix":""}],"aff":[{"rid":"1780999","text":"2"}],"role":[],"deceased":false},{"name":[],"stringName":[{"lang":"zh","surname":"王振龙","prefix":""},{"lang":"en","surname":"WANG Zhen-long","prefix":""}],"aff":[{"rid":"1781000","text":"3"}],"role":[],"deceased":false}],"aff":[{"id":"1780998","intro":[{"lang":"zh","label":"1","text":" 深圳大学 机电与控制工程学院 深圳市模具先进制造技术重点实验室,广东 深圳,518060","data":[{"name":"text","data":" 深圳大学 机电与控制工程学院 深圳市模具先进制造技术重点实验室,广东 深圳,518060"}]},{"lang":"en","label":"1","text":" Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die, College of Mechatronics and Control Engineering, Shenzhen University","data":[{"name":"text","data":" Shenzhen Key Laboratory of Advanced Manufacturing Technology for Mold & Die, College of Mechatronics and Control Engineering, Shenzhen University"}]}]},{"id":"1780999","intro":[{"lang":"zh","label":"2","text":" 深圳大学 电子科学与技术学院 深圳市激光工程重点实验室,广东 深圳,518060","data":[{"name":"text","data":" 深圳大学 电子科学与技术学院 深圳市激光工程重点实验室,广东 深圳,518060"}]},{"lang":"en","label":"2","text":" Shenzhen Key Laboratory of Laser Engineering, College of Electronic Science and Technology, Shenzhen University","data":[{"name":"text","data":" Shenzhen Key Laboratory of Laser Engineering, College of Electronic Science and Technology, Shenzhen University"}]}]},{"id":"1781000","intro":[{"lang":"zh","label":"3","text":" 哈尔滨工业大学 机电工程学院 微系统与微结构制造教育部重点实验室,黑龙江 哈尔滨,150001","data":[{"name":"text","data":" 哈尔滨工业大学 机电工程学院 微系统与微结构制造教育部重点实验室,黑龙江 哈尔滨,150001"}]},{"lang":"en","label":"3","text":" Key Laboratory of Micro-systems and Micro-structures Manufacturing of the Ministry of Education, School of Mechanical Engineering, Harbin Institute of Technology","data":[{"name":"text","data":" Key Laboratory of Micro-systems and Micro-structures Manufacturing of the Ministry of Education, School of Mechanical Engineering, Harbin Institute of Technology"}]}]}]},"abstracts":[{"lang":"zh","data":[{"name":"p","data":[{"name":"text","data":"采用飞秒激光切割和微细电阻滑焊组合的方法制备了高深宽比的三维微结构。为了提高每层二维微结构的叠加精度和连接强度，用逐层微细电阻滑焊对每层二维微结构进行滑焊以获得较好的工艺参数。对上述工艺参数所制备的微结构进行了抗剪切能力测试，测试结果显示：随着滑焊放电次数的增加，微结构的极限剪切力由8.04N逐渐增加至65.97N。而后，通过能量分散光谱仪（EDS）对电极的沉积效应进行了研究。最后，在120mW的飞秒激光，50μm/s的切割速度，0.21V的焊接电压，0.2MPa的焊接压强，100ms的预压时间，10ms的焊接时间以及160次的滑焊放电次数等工艺参数下制备了基本尺寸为50μm×50μm的微方孔阵列以及微齿轮结构。实验结果表明：通过逐层微细电阻滑焊制备的微结构表面质量良好，各层微结构之间叠加较好，显示逐层微细电阻滑焊可以较好地保证三维微结构中各层二维微结构的连接强度和叠层精度。"}]}]},{"lang":"en","data":[{"name":"p","data":[{"name":"text","data":"A 3D microstructure with a high depth-to-width ratio was fabricated by combining femtosecond laser cutting and micro-electric resistance slip welding. To improve laminated precision and connection strength of every layer 2D microstructure, the layer-by-layer micro-electric resistance slip welding was used for every layer 2D microstructure to obtain a better technological parameters. Under above process parameters, the anti-shear ability of 3D microstructure was tested. The test results indicate that with the number of the slip welding discharges increasing, the yield shear stress of microstructure increases from 8.04 N to 65.97 N.Then, the deposition effect of the tungsten bar electrode produced during layer-by-layer micro-electric resistance slip welding was also studied through the Energy Dispersive Spectrometer(EDS)analysis.Finally, micro array square holes with a size of 50 μm×50 μm and a micro-gear cavity were processed after 160 time's slip welding discharge under a femtosecond laser power of 110 mW, a cutting speed of 50 μm/s, a welding voltage of 0.21 V,welding time of 10 ms,and a welding pressure of 0.2 MPa.The fabrication results show that the 3D microstructures processed by the layer-by-layer micro-electric resistance slip welding have good surface quality and the superposition between the layers of microstructure.Therefore, layer-by-layer micro-electric resistance slip welding can guarantee the connection strength and laminated precision of every layer 2D microstructure."}]}]}],"keyword":[{"lang":"zh","data":[[{"name":"text","data":"三维微结构"}],[{"name":"text","data":"飞秒激光切割"}],[{"name":"text","data":"逐层微细电阻滑焊"}],[{"name":"text","data":"沉积效应"}]]},{"lang":"en","data":[[{"name":"text","data":"3D micro-structure"}],[{"name":"text","data":"femtosecond laser cutting"}],[{"name":"text","data":"layer-by-layer micro-electric resistance slip welding"}],[{"name":"text","data":"deposition effect"}]]}],"highlights":[],"body":[],"footnote":[],"reflist":{"data":[{"id":"ref1","label":"1","citation":[{"lang":"zh","text":[{"name":"text","data":"FOFONOFF T, MARTELLS S, HUNTER I.Assembly-ready brain microelectrode arrays.Proceedings of the 25th Annual International Conference of the IEEE EMBS, 2003, 2:17-21."}]}]},{"id":"ref2","label":"2","citation":[{"lang":"zh","text":[{"name":"text","data":"FOFONOFF T, MARTELLS S, NICHOLAS G, et al..Microelectrode array fabrication by electrical discharge machining and chemical etching [J].IEEE Transaction on Biomedical Engineering, 2004, 6(51):890-895."}]}]},{"id":"ref3","label":"3","citation":[{"lang":"zh","text":[{"name":"text","data":"TAKAHATA K, YOGESH B.Batch mode micro-electro-discharge machining [J].Journal of Microelectromechanical Systems, 2002, 11(2):102-110."}]}]},{"id":"ref4","label":"4","citation":[{"lang":"zh","text":[{"name":"text","data":"TSUNEO K, KUNIO C, SHINICHIROU K, et al..A study of three-dimensional shape machining with an ECμM system [J].International Journal of Machine Tools & Manufacture, 2006, 46(12-13):1311-1318."}]}]},{"id":"ref5","label":"5","citation":[{"lang":"zh","text":[{"name":"text","data":"EKMEKCI B, ATAKAN S.Debris and consequences in micro electric discharge machining of micro-holes [J].International Journal of Machine Tools & Manufacture, 2013, 65(2):58-67."}]}]},{"id":"ref6","label":"6","citation":[{"lang":"zh","text":[{"name":"text","data":"DO K C, HONG S S, CHONG N C.Modeling and experimental investigation for electrolytic corrosion prevention in high frequency micro EDM using deionized water [J].Microsyst Technol., 2012, 18(6):703-712."}]}]},{"id":"ref7","label":"7","citation":[{"lang":"zh","text":[{"name":"text","data":"DO K C, HONG S S, BO H K, et al..Surface finishing of micro-EDM holes using deionized water [J].Journal of Micromechanics and Microengineering, 2009, 19:1-7."}]}]},{"id":"ref8","label":"8","citation":[{"lang":"zh","text":[{"name":"text","data":"HUNG J C, YAN B H, LIU H S, et al..Micro-hole machining using micro-EDM combined with electropolishing [J].Journal of Micromechanics and Microengineering, 2006, 16:1480-1486."}]}]},{"id":"ref9","label":"9","citation":[{"lang":"zh","text":[{"name":"text","data":"NGUYEN M D, MUSTAFIZUR R, WONG Y S.Modeling of radial gap formed by material dissolution in simultaneous micro-EDM and micro-ECM drilling using deionized water [J].International Journal of Machine Tools & Manufacture, 2013, 66(3):95-101."}]}]},{"id":"ref10","label":"10","citation":[{"lang":"zh","text":[{"name":"text","data":"NGUYEN M D, MUSTAFIZUR R, WONG Y S.Simultaneous micro-EDM and micro-ECM in low-resistivity deionized water [J].International Journal of Machine Tools & Manufacture, 2012, 54-55(3-4):55-65."}]}]},{"id":"ref11","label":"11","citation":[{"lang":"zh","text":[{"name":"text","data":"赵万生, 李志勇, 王振龙, 等. 微三维结构电火花铣削关键技术研究[J]. 微细加工技术, 2003, 9:49-55. ZHAO W SH, LI ZH Y, WANG ZH L, et al..Research on key techniques of 3D micro-EDM milling[J].Micro-fabrication Technology, 2003, 9:49-55.(in Chinese)"}]}]},{"id":"ref12","label":"12","citation":[{"lang":"zh","text":[{"name":"text","data":"王振龙, 赵万生, 刘光壮. 基于分层制造原理的微细电火花加工技术研究[J]. 机械工程学报, 2002, 2(38):22-26. WANG ZH L, ZHAO W SH, LIU G ZH.Research on laminated removal micro-EDM [J].Chinese Journal of Mechanical Engineering, 2002, 2(38):22-26.(in Chinese)"}]}]},{"id":"ref13","label":"13","citation":[{"lang":"zh","text":[{"name":"text","data":"贾振元, 任小涛, 刘巍, 等. 大深径比微小孔快速电火花加工系统[J]. 光学 精密工程, 2009, 12(17):3055-3061. JIA ZH Y, REN X T, LIU W, et al..Rapid EDM systems for micro and small holes with high-aspect-ratio[J].Opt.Precision Eng., 2009, 12(17):3055-3061.(in Chinese)"}]}]},{"id":"ref14","label":"14","citation":[{"lang":"zh","text":[{"name":"text","data":"杜立群, 莫顺培, 张余升, 等. UV-LIGA和微细电火花加工技术组合制作三维金属微结构[J]. 光学 精密工程, 2010, 18(2):363-368. DU L Q, MO SH P, ZHANG Y SH, et al..Fabrication of 3D metal microstructure based on UV-LIGA and micro-EDM technology [J].Opt.Precision Eng., 2010, 18(2):363-368.(in Chinese)"}]}]},{"id":"ref15","label":"15","citation":[{"lang":"zh","text":[{"name":"text","data":"胡洋洋, 朱荻, 李寒松, 等. UV-LIGA制作超高微细阵列电极技术[J]. 光学 精密工程, 2010, 18(3):670-675. HU Y Y, ZHU D, LI H S, et al..Fabrication of ultra-high metal micro electrode array using UV-LIGA technology [J].Opt.Precision Eng., 2010, 18(3):670-675.(in Chinese)"}]}]},{"id":"ref16","label":"16","citation":[{"lang":"zh","text":[{"name":"text","data":"徐斌, 伍晓宇, 凌世全, 等. 飞秒激光切割与微细电阻滑焊组合制备三维金属微结构[J]. 光学 精密工程, 2012, 20(8):1312-1324. XU B, WU X Y, LING SH Q, et al..Fabrication of 3D metal micro-structure based on fs laser cutting and micro electric resistance slip welding [J].Opt.Precision Eng., 2012, 20(8):1312-1324.(in Chinese)"}]}]},{"id":"ref17","label":"17","citation":[{"lang":"zh","text":[{"name":"text","data":"XU B, WU X Y, LING SH Q, et al..Study on tungsten electrode deposition effect of 3D metal micro-mold during laminated slip welding [J].International Journal of Advanced Manufacturing Technology, 2013, 67:2529-2536."}]}]}]},"response":[],"contributions":[],"acknowledgements":[],"conflict":[],"supportedby":[],"articlemeta":{"doi":"10.3788/OPE.20142205.1251","clc":[[{"name":"text","data":"TG485;TG661"}]],"dc":[],"citeme":[],"fundinggroup":[{"lang":"zh","text":[{"name":"text","data":"国家自然科学基金资助项目（No.51175348，51375315）;广东省教育厅重点实验室开放基金资助项目（No.201002）"}]}],"history":{"received":"2013-12-09","revised":"2014-01-20","ppub":"2014-05-25","opub":"2020-08-11"}},"appendix":[],"ethics":[],"backSec":[],"supplementary":[],"issue":"5","volume":"22","originalSource":[]}